METHOD OF SEPARATING SILICON INTO FRACTIONS ENRICHED WITH HEAVY AND LIGHT ISOTOPES

摘要

FIELD: isotope separation technology. SUBSTANCE: method is based on chemical exchange between simple silicon-containing compounds: gas-phase substance SiH₄ and liquid- phase substance Si₂H₆. Known monosilaneinto-disilane conversion technology is used involving passage of monosilane through electric discharge region and cooled traps. Because of isotope exchange, monosilane is enriched with light isotope ²⁸Si and disilane with heavy isotope ³⁰Si. Process is optimized by controlling pressure and temperature of reagents according to P-T phase state diagram of disilane. Withdrawal of enriched fractions and replacement of consumed reagent are performed not stopping production. Isotope separation process is conducted in closed mode. EFFECT: reduced process expenses. 2 tbl, 1 tbl