A temperature compensation methodology for piezoelectric based sensor devices

摘要

A temperature compensation methodology comprising a negative temperature coefficient thermistor with the temperature characteristics of a piezoelectric material is proposed to improve the measurement accuracy of piezoelectric sensing based devices. The piezoelectric disk is characterized by using a disk-shaped structure and is also used to verify the effectiveness of the proposed compensation method. The measured output voltage shows a nearly linear relationship with respect to the applied pressure by introducing the proposed temperature compensation method in a temperature range of 25-65 °C. As a result, the maximum measurement accuracy is observed to be improved by 40%, and the higher the temperature, the more effective the method. The effective temperature range of the proposed method is theoretically analyzed by introducing the constant coefficient of the thermistor (B), the resistance of initial temperature (R_0), and the paralleled resistance (R_x). The proposed methodology can not only eliminate the influence of piezoelectric temperature dependent characteristics on the sensing accuracy but also decrease the power consumption of piezoelectric sensing based devices by the simplified sensing structure.