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The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

机译:两种厚膜沉积方法对二氧化锡气体传感器性能的影响

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摘要

This work demonstrates the variability in performance between SnO2 thick film gas sensors prepared using two types of film deposition methods. SnO2 powders were deposited on sensor platforms with and without the use of binders. Three commonly utilized binder recipes were investigated, and a new binder-less deposition procedure was developed and characterized. The binder recipes yielded sensors with poor film uniformity and poor structural integrity, compared to the binder-less deposition method. Sensor performance at a fixed operating temperature of 330 °C for the different film deposition methods was evaluated by exposure to 500 ppm of the target gas carbon monoxide. A consequence of the poor film structure, large variability and poor signal properties were observed with the sensors fabricated using binders. Specifically, the sensors created using the binder recipes yielded sensor responses that varied widely (e.g., S = 5 – 20), often with hysteresis in the sensor signal. Repeatable and high quality performance was observed for the sensors prepared using the binder-less dispersion-drop method with good sensor response upon exposure to 500 ppm CO (S = 4.0) at an operating temperature of 330 °C, low standard deviation to the sensor response (±0.35) and no signal hysteresis.
机译:这项工作证明了使用两种类型的膜沉积方法制备的SnO2厚膜气体传感器之间的性能差异。 SnO2粉末在使用和不使用粘合剂的情况下均沉积在传感器平台上。研究了三种常用的粘合剂配方,并开发了一种新的无粘合剂沉积程序并进行了表征。与无粘合剂的沉积方法相比,粘合剂的配方生产的传感器具有较差的薄膜均匀性和较差的结构完整性。通过暴露于500 ppm目标气体一氧化碳,评估了在不同的膜沉积方法下于330°C的固定工作温度下的传感器性能。使用粘合剂制造的传感器观察到薄膜结构差,变异性大和信号特性差的结果。具体来说,使用活页夹配方创建的传感器产生的传感器响应变化很大(例如,S = 5 – 20),通常在传感器信号中存在滞后现象。使用无粘结剂分散液滴法制备的传感器可观察到可重复的高质量性能,在330°C的工作温度下暴露于500 ppm CO(S = 4.0)时具有良好的传感器响应,传感器的标准偏差低响应(±0.35),无信号滞后。

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