Semiconductor type thick film gas sensor device, and apparatus for measuring performance of a gas sensor device

摘要

In the semiconductor thick film gas sensor device according to the present invention, two or more sensors including an electrode and a sensing film are formed on the front of the substrate to form a sensor array, and a heater is formed on the back of the substrate, and the sensing material constituting the sensing film is oxidized. Include comments. Moreover, the performance measuring apparatus of the gas sensor element by this invention contains a 4-way valve and a mini reactor.;The semiconductor thick film gas sensor element has excellent selectivity against various gases, particularly chemical agents used in chemical terrorism. In addition, the performance measuring device of the gas sensor element minimizes the reaction time of the gas sensor element and the measurement gas.;Semiconductor thick film gas sensor, sensor array, tin oxide, alumina, indium oxide, zinc oxide, zirconium oxide, 4-way valve, mini reactor