基于硅塑性变形的蛇形梁垂直梳齿驱动器

摘要

A vertical comb actuator based on the plastic-deformation process is designed. The movable center micro-mirror is sustained by four groups of serpentine elastic beams. The fabrication of actuator is based on Si-Si bending technology. The DRIE etching method is used to release the movable combs and fixed combs. The precise self-aligning between the movable combs and fixed ones is implemented with the usage of the stage on the cover wafer fabricated by KOH anisotropic etching. The vertical offset structure is generated between movable combs and fixed ones with the plastic-deformation process and a Z direction electrostatic vertical comb actuator with serpentine elastic beam is fabricated successfully.%设计了基于硅塑性变形的垂直梳齿驱动器,中央可动微镜由四组蛇形曲折梁支撑.驱动器的制作采用硅一硅键合技术,首先利用DRIE干法刻蚀技术释放可动梳齿与固定梳齿,然后通过各向异性湿法腐蚀制作的施压凸台实现可动梳齿和固定梳齿的精确自对准,最后利用硅塑性变形使可动梳齿和固定梳齿在垂直方向上产生位错,成功制作出在Z方向依靠位错梳齿实现垂直驱动的蛇形梁静电梳齿驱动器.