铁掺杂In2O3纳米粉体及其气敏性能研究

摘要

The preparation of Fe doped In2O3 nano-powder using a hydrothermal method is introduced. Its size,phase and morphology are analyzed by XRD, SEM and TEM. The gas sensing characteristics of the materials are tested in static slate. The results show that the morphology of the In2O3 with mass fraction 7％ Fe is rods with good dispersity. The average length of the as-synthesized rods is about 300 ～500 nm,and the width is 20 nm. The In2O3 with mass fraction 7 ％ Fe has the highest sensitivity as high as 182.75 to 100 × 10 -6 Cl2 at lower working temperature 125 ℃. And the In2O3 with mass fraction 7％ Fe also has a high sensitivity as high as 17.9 to 10 ×10-6 Cl2 at 125 ℃. So the sensors can tests low volume fraction of Cl2. The sensor based on In2O3 also has satisfied selectivity,quick response and recover.%对 In2O3 粉体进行 Fe 掺杂,采用水热法合成了In2O3 粉体.通过 X 射线衍射(XRD),扫描电镜(SEM),透射电子显微镜(TEM)等手段对粉体的物相、形貌、粒度等进行表征.TEM 图表明:质量分数为7 %Fe 掺杂的样品为均匀排列的棒,长度约为 300～500nm,宽度约 20 nm.对样品进行气敏性能研究,结果表明:质量分数为 7 %Fe 掺杂的 In2O3 气敏元件,当工作温度为 125℃时,对 100×10-6>Cl2 的灵敏度高达 182.75.元件对 10×10-6Cl2的灵敏度为 17.9,可以检测到低体积分数的 Cl2.并具有选择性好、响应-恢复时间短等特性.