微波等离子清洗技术在LCD中的应用

摘要

Microwave plasma cleaning technology is superior in environmental characteristics and decontamination capabilities. But the shortage of plasma producing with the traditional method limits the application of plasma cleaning technology in industry. Recently, the theoretical research and practice of plasma shows that it can avoid electrostatic damage in cleaning process by microwave through changing the condition of creating plasma, so it provides the possibility for expanding the application of plasma technology in industry. This paper introduces the principle and method of plasma cleaning equipment, analyzes the application of microwave plasma cleaning equipment in LCD, and brings the possible improving method to the questions existent in LCD industry.%微波等离子清洗技术具有优越的环境特性和去污能力，但传统产生等离子体的不足限制了等离子清洗技术在工业中的应用，近期等离子领域的理论研究及实践表明通过改变等离子体的生成条件，使用微波产生等离子可以避免清洗中产生的静电损伤，从而为扩展等离子技术在工业中的应用提供可能。在此介绍了等离子清洗机的基本原理和方法，分析了微波等离子清洗机在LCD中的应用，并针对LCD产业中存在的主要问题提出了可行的改进方法。