激光直写中S曲线光强控制模型的参数优化

摘要

An optimization method of S-curve intensity control model was propoded for further im provement of joint quality during laster direct writing.On the basis of analyzing the effect of the Scurve parameter varation on the joint quality,the optimized interrelationship of the radian and the radius R used in the control model was established consdering in to be optimial when the exposure does distribution gor an extremum at one point. The joint length after optimization can be simply determined by the radian Φ，and is just twice as long as that of using slope-line control method.The experimental results are consistent with the theoretical analysis，and indicate that the proposed optimization method can further increase the valid transition area length and can reduce the variation rate of exposure dose distribution at the joint area.Therefore the proposed method improves the joint quality as well as guarantees the writing efficiency.%提出了一种S曲线光强控制模型的参数优化方法.在分析S曲线光强控制模型的参数变化对线条闭合质量影响的基础上,以对接区域曝光量分布曲线恰好存在一个极值点时为最优,确定出光强控制模型中的圆弧弧度θ和曲率半径R的函数关系.基于该优化方法的对接区域长度由θ唯一确定,且当θ较小时,其仅为斜线段光强控制方法确定的对接长度的2倍.实验结果与理论分析吻合,表明该优化方法进一步增加了对接区域曝光量分布的有效过渡长度,减缓了曝光量在路径方向上的变化速率,从而在保证直写效率的同时提高了线条对接质量.