针对微小非球面斜轴镜面磨削时存在的表面/亚表面缺陷、表面粗糙度均匀性差以及传统抛光工艺难以抛光微小非球面等一系列难题，开发一种利用磁性复合流体和斜轴抛光方式进行微小凹非球面超精密抛光的新工艺。以口径在10 mm以下的超精密微细透镜及微细模具中的各种微小球面、微小凹非球面为主要加工对象，展开磁性复合流体抛光工艺研究。分析磁性复合流体工艺参数对加工质量和表面去除率的影响，优化工艺参数，解决了微小非球面纳米抛光的关键技术问题。%Aiming at the problems of surface/subsurface defects, poor roughness uniformity and difficult-to-polishing of micro aspheric surface using inclined-axis mirror grinding and conventional polishing process, a new process integrated with magnetic compound fluid and inclined-axis polishing is proposed for ultra-preci-sion polishing of micro aspheric surface. A study which takes micro spherical and aspheric surface of micro lens and mold with less than 10mm in diameter for objects, will be unfolded for magnetic compound fluid. It was investigated that the influence of the process parameters on machining quality and the surface removal rate of magnetic compound fluid and the parameters was optimized. It solves the key technical problems for nano-polishing of micro aspheric surface.
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