Study on combined polishing process of aspherical aluminum mirrors

摘要

The aluminum mirrors are widely used as important optical components in some vital fields such as astronomical instruments or military installations due to the unique advantages of aluminum alloy. In order to simplify the structure of optical system and improve the performance at the same time, it's a tendency that the optics will be designed to aspherical or other freeform shapes. However, the traditional techniques are falling to have adequate abilities to deal with the increasing demands of aluminum optics. For example, the tool marks leaved on the surface from single point diamond turning (SPDT) has obvious adverse effects to optical system. The deterministic and sub-aperture polishing process has showed the potential to fabricate complex shapes over the few years. But it's still recognized as a problem to polish bare aluminum directly because of its soft surface and active chemical characteristics. Therefore, a combination of magnetorheological finishing (MRF) and small tool polishing (STP) is applied to obtain high performance aluminum optics in this paper. A paraboloid aluminum mirror was polished with this proposed method, and the results showed that the surface texture of the sample is restrained from rms 0.409λ(λ=632.8nm) to rms 0.025λ, and the surface roughness is improved from average Ra 6~7nm to Ra 3~4nm.