高次非球面微晶玻璃元件的抛光工艺研究

摘要

基于德国OptoTech ASM100CNC铣磨机和OptoTech ASP200CNC-B抛光机组成的非球面数控加工中心,研究了口径φ110mm高次非球面微晶玻璃透镜的铣磨、抛光工艺以及相关工艺参数,同时采用英国TAYLOR HOBSON轮廓仪,在抛光中对其面形误差进行多次反馈补偿,使微晶玻璃零件表面的面形精度逐步收敛,最终获得高次非球面微晶玻璃元件表面面形Rt(PV值)为0.62μm;表面粗糙度为0.01μm;表面光洁度为三级.%Based on aspheric computer controlled manufacturing center (Germany OptoTech ASM100CNC milling ma— chine and OptoTech ASP200CNC-B Polishing machine), as for φ110mm high-order aspheric zerodur lens, researched the grinding processing, polishing processing and the related processing parameters. And using the United Kingdom TAYLOR HOBSON profilometer for making a number of feedback compensation to surface shape error during polish-ing, so that the surface shape accuracy can be gradually diminished, so that the surface shape accuracy can be gradual-ly diminished. It' s showed that the final surface figure of the lens is 0.62μm; and the surface roughness is O.Olμtm.the surface glass finish is III.