采用化学腐蚀法制备光纤Fabry-Perot应变传感器

摘要

An optical fiber Fabry-Perot sensor was fabricated by chemical etching and discharge splicing.A groove depth of 21 μm was fabricated on the single-mode fiber end through 40％ hydrofluoric acid corrosion during 20 min.The fiber after chemical corrosion processing was spliced with another fiber that ending face is plane.Through optimizing splicing parameters of fusion splicer,an all-fiber Fabry-Perot structure was realized in the experiment,and the interference fringe contrast was 8 dB,the wavelength interval was 14 nm.In the experiment,the measurement system was designed,and strain characteristics were experimentally investigated.The load strain sensitivity and its linearity are 3.78 pm/με and 0.999 respectively;the unload strain sensitivity and its linearity are-4.25 pm/με and 0.985 respectively.%提出了一种采用化学腐蚀方法制备光纤Fabry-Perot(F-P)传感器的方法,采用浓度为40％的氢氟酸溶液对单模光纤端面进行腐蚀处理,并通过电弧放电对光纤端面进行熔接,制作光纤F-P传感器.实验中,将单模光纤端面在40％浓度的氢氟酸中腐蚀20 min制作出深度21μm的凹槽,并将该腐蚀过的光纤和端面切平的单模光纤相对熔接,通过电弧放电进行熔接构成F-P腔结构,条纹对比度为8 dB;对制备的光纤F-P传感器的应变特性及温度特性进行了实验和分析,结果表明采用化学腐蚀法制作的光纤F-P传感器对应变具有良好的灵敏度,加载灵敏度可达到3.78 pm/με,线性度为0.999;卸载灵敏度为-4.25 pm/με,线性度为0.985.