Materials Science and Engineering School, University of Science & Technology Beijing, Beijing 100083, China;
Applied Science School, University of Science & Technology Beijing, Beijing 100083, China;
Materials Science and Engineering School, University of Science & Technology Beijing, Beijing 100083, China;
Materials Science and Engineering School, University of Science & Technology Beijing, Beijing 100083, China;
Materials Science and Engineering School, University of Science & Technology Beijing, Beijing 100083, China;
Materials Science and Engineering School, University of Science & Technology Beijing, Beijing 100083, China;
CVD diamond film; atomic Cl; revised KMC (Kinetic Monte Carlo) method; atomic scale simulation;