声明
Abstract
摘要
TABLE OF CONTENTS
1．1 Foreword
1．2 Zinc Oxide-A versatile material
1．3 Basic properties of ZnO
1．3．1 Crystal structure
1．3．2 Energy band structure
1．3．3 Optical properties of ZnO
1．3．4 Electrical properties of ZnO
1．4 ZnO thin film deposition
1．4．1 Vapor-phase film deposition techniques
1．4．2 Liquid-phase film growth techniques
1．5 Doping of ZnO thin films
1．6 Applications of ZnO thin films
1．7 Aim of the thesis
References
Chapter 2 Experimental Methods and Principles
2．1 Foreword
2．2 Chemical solution methods for thin film growth
2．2．1 Sol-Gel method
2．2．2 Reverse-Microemulsion method
2．2．3 Hydrothermal method
2．2．4 Chemical Bath Deposition
2．3 Chemical reagents and experimental apparatus
2．3．1 Chemical reagents
2．3．2 Experimental apparatus
2．4 Thin film characterization techniques and principles
2．4．1 X-ray diffraction
2．4．2 Scanning electron microscopy
2．4．3 Atomic force microscopy
2．4．4 Transmission electron microscopy
2．4．5 X-ray photoelectron spectroscopy
2．4．6 Ultraviolet-visible spectroscopy
2．4．7 Photoluminescence spectroscopy
2．4．8 Standard four-probe method
2．4．9 Van der Pauw method
2．4．10 Contact angle measurement
References
Chapter 3 Growth optimization study of Sol-Gel derived Al-doped ZnO thin films
3．1 Introduction
3．2 Experimental procedure
3．2．1 Precursor solution preparation
3．2．2 Thin film deposition
3．2．3 Characterization and analysis
3．3 Effects of Al doping content and annealing temperature on the properties of AZO thin films
3．3．1 Effects on the crystal structure of AZO thin films
3．3．2 Effects on the morphology of AZO thin films
3．3．3 Effects on the optical properties of AZO thin films
3．4 Effects of sol aging time on the properties of AZO thin films
3．4．1 Introduction
3．4．2 Experimental details
3．5 Results and discussion
3．5．1 Effect of sol aging time on the structural properties of AZO films
3．5．2 Effect of sol agmg time on the morphology of AZO films
3．5．3 Effect of sol aging time on the chemical states of AZO films
3．5．4 Effect of sol aging time on the optical properties of AZO films
3．5．5 Effect of aging time on the solution chemistry
3．6 Conclusion
References
Chapter 4 Fabrication and growth mechanism study of non-polar m-plane(10(1)0)ZnO thin films on Si substrates
4．1 Introduction
4．2 Experimental procedure
4．2．1 Etching of Si substrates
4．2．2 Preparation of ZnO seeds
4．2．3 CBD precursor solution preparation and film growth
4．2．4 Characterization and analysis
4．3 Results and discussion
4．3．1 Etched Si substrate analysis
4．3．2 ZnO seeds crystal structure and morphology
4．3．3 CBD grown ZnO films
4．4 Conclusion
References
Chapter 5 Fabrication and growth mechanismstudy of non-polar a-plane(11(2)0)ZnO thin films on glass substrates
5．1 Introduction
5．2 Experimental procedure
5．2．2 CBD precursor solution preparation and film growth
5．2．3 Characterization and analysis
5．3 Results and discussion
5．3．1 Role of seeds／seed layer in solution-based film grown methods
5．3．2 Structure and morphology of Sol-Gel ZnO seed layer film
5．3．3 Structure and morphology of CBD ZnO thin film
5．3．4 Growth mechanism of non-polar CBD ZnO thin film
5．3．5 Optical properties of non-polar CBD ZnO film
5．3．6 Electrical properties of non-polar CBD ZnO film
5．3．7 Surface wetting properties of non-polar CBD ZnO film
5．4 Conctusion
References
Chapter 6 Fabrication and growth mechanism study of texture controlled ZnO thin films
6．1 Introduction
6．2 Experimental procedure
6．2．1 Preparation of Sol-Gel ZnO seed layer films
6．2．2 CBD precursor solution preparation and film growth
6．2．3 Characterization and analysis
6．3 Results and Discussion
6．3．1 Effect of seed layers on CBD ZnO tbin films texture，a comparative approach
6．3．2 Effect of seed layers characteristics on CBD ZnO films texture，an experimental approach
6．3．3 Texture controlled growth of CBD ZnO films
6．4 Conclusion
References
Chapter 7 Conclusions
Acknowledgements
Publications and Conferences
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