讨论了一种多梳齿力平衡式微机械加速度计表头系统工作原理.因加速度计制造中存在的间距不对称,提出通过调节正负反馈电压比的方法来减小输出非线性误差,并得到了调节的约束关系式.通过体硅深宽比刻蚀和微键合工艺制造了加速度计并进行了封装,闭环电路实验测试得到在未修正系数前,加速度计在量程为-60 ～65 g时最大非线性误差为-0.8％,修正后满量程最大非线性误差为0.08％.试验结果与理论分析能很好地吻合,验证了方法的有效性.%This paper introduced a multi-finger micro-acceleremeter based on MEMS technology,and described the characteristic of the aensor microstructure and the system operation principle. Due to the nonlinear error of output voltage generated by drawback of fabrication process,the method to eliminate the error was presented,which was developed to adjust ration between the positive feedback voltage and negative feedback voltage. After fabrication and package for the accelerometer, the experiment results show that they are well correspondence with theoretical analyses. Before and after correctional the ration, the nonlinear scale error was -0.8% and 0.08% respectively,performance indexes satisfy the requirement of design.
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