碳化硅基MOEMS压力传感器建模与仿真研究

摘要

Under the extreme high-temperature in the field of aeronautics and astronautics , a reflective optical-fiber sensing method based on the curvature deformation of silicon carbide circular diaphragm was presented for high -performance pressure meas-urement .The stress and deformation distribution of the SiC circular diaphragm as sensitive element was discussed by elastic me -chanics theory and grid simulation .The mathematics model of SiC pressure sensor in the reflective optical-fiber MEMS system was deduced.And a series of optimization analyses and computer simulations about maximum measuring-scale,sensitivity,input-output characteristics for the SiC circular diaphragm were achieved .The simulation results show the optimal design scheme for obtaining highest sensitivity in optical-force measurement of SiC diaphragm ,and the favorable linear operation characteristic appears at the large measuring-scale,thus providing the theoretical foundation for designing of SiC-based MOEMS pressure sensors .%针对航空航天领域对高温极端条件下压力测量的高性能要求，提出一种基于碳化硅（ SiC）弹性敏感膜片曲率变形来实现反射式光纤传感测量压力的方法。基于弹性力学理论和网格模拟方法探讨了敏感元件SiC圆平膜片的应力和形变分布，推导出光纤反射式微机电系统SiC压力传感器的数学模型，并对SiC压力传感器敏感元件的最大量程、灵敏度、输入－输出特性等进行了一系列的优化分析和计算机模拟。仿真结果表明了SiC敏感膜片的光测力灵敏度最优设计方法，在大量程范围内具有优越的线性工作特性，为研发大量程碳化硅基微光机电系统（MOEMS）压力传感器提供了有力的理论依据。