全差分三轴MEMS电容加速度计的设计

摘要

采用刻蚀氧化硅牺牲层、沉淀多晶硅、再次刻蚀多晶硅的工艺,设计了基于单一敏感质量块的全差分三轴电容式加速度计.根据外界加速度激励对器件的不同位移作用,详细分析了三轴方向上加速度激励的交叉耦合影响.最后结合仿真结果得出:该器件具备结构简单紧凑、抗干扰能力强、灵敏度高、工艺简单等优点,在电子消费领域有很好的应用前景.%A fully-differential tri-axis capacitive accelerometer based on the single sensitive mass was designed by etching silicon oxide layer,precipitating and then etching polysilicon methods.What's more,the acceleration excitations cross coupling influences between three axes were analyzed according to different displacements caused by outside acceleration excitation.Finally,referring to simulation analyses,the fact that this accelerometer has advantages of simple construction,strong interference capacity,high sensitivity and simple craft,which has good application prospect in the field of consumer electronics.