用于高冲击检测硅基三轴集成压阻式MEMS加速度芯片的建模与仿真

摘要

主要讨论硅基单芯片集成的三轴压阻式MEMS加速度计芯片的建模与仿真.通过有限元软件ANSYS建立的结构模型可以较好的理解和分析所要设计的加速度芯片在承受任意不同轴向加速度所产生惯性力时的静态表现.利用有限元软件ANSYS我们详细分析了各个悬臂梁在承受不同轴向惯性力时的应力变化,确定出敏感电阻的位置.通过LS-DYNA软件对所设计的加速度计芯片进行了不同方向撞击刚性墙时的器件受分析,分析结果表明所设计的结构在理论上是可行的.%This paper presents analytical models for tri-axial accelerometer chip based on one seismic mass and eight beams. The model makes it possible to better understand and to predict the behavior of the accelerometer. The accelerometer discussed in this paper was designed to measure inertia force in an arbitrary direction. This paper uses finite element design for optimization of the device structure. FEA software ANSYS was used to simulate the behavior of the accelerometer when it was subjected to inertia force in random direction. We analyses the positions on every beam when the mass subjects different direction acceleration in order to find the suitable position. The FEA software LS-DYNA was used to simulate the accelerometer impacts to the steel wall in random directions. Analysis Results presents that the theoretical structure is feasible.