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Chinese Society of Micro-Nano Technology.

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1.Effect of micro structures of diffusers on optical properties of LED light

机译：漫射器微结构对LED光学光学性质的影响
- 作者：Yang Zhou;Daming Wu;Xiuting Zheng;Yajun Zhang;Jian Zhuang;Xiaoxiang He
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- transmittance;
- uniformity;
- micro structures;
- diffuser;
- LED light;
2.Investigation of Silicon Lapping and Polishing Technique for Micro-inertial Device

机译：微惯用装置硅研磨与抛光技术研究
- 作者：Zhang Long;Zhu Jian
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Micro-inertial Device;
- precision lapping;
- precision polishing;
- flatness;
- roughness;
3.Simulation of Injection Molding of Ultra-thin Light Guide Plate with Hemispherical Microstructures

机译：具有半球形微结构的超薄导光板注射成型模拟
- 作者：Pengwei Dong;Zhongli Zhao;Daming Wu;Yajun Zhang;Jian Zhuang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Micro-injection molding;
- Parameters;
- Light guide plate;
- Residual stress;
- Simulation;
4.A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors

机译：应用于微型惯性传感器的高性能四阶单环Sigma Delta调制器
- 作者：Wang Pengfei;Yuan Yuan;Wang Dongbo;Liu Xiaowei;Liu Junan
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Modulator;
- Sigma-delta;
- Stability;
- SNR;
5.Research on the hydrophobicity of black silicon based on Virtual Process

机译：基于虚拟过程的黑色硅疏水性研究
- 作者：Li Xin;Wang Chen;Sun Guangyi;Zhao Xin;Zhang Haixia;Lu Guizhang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Process simulation;
- black silicon;
- hydrophobicity;
6.Heating carve technique for polymer microfluidic microchannel

机译：用于聚合物微流体微通道的加热曲面技术
- 作者：X. W. Han;W. Wang;G. H. Ye;X. W. Liu;L Tian;Z. G. Mao
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- microfluidic chip;
- polymer;
- heating carve technique;
7.A silicon micro-accelerometer with triangle cross-section beam by anisotropic wet etching in TMAH solution

机译：具有三角形横截面梁的硅微观加速度计通过TMAH溶液各向异性湿法蚀刻
- 作者：Yu Lv;Hongjuan Cui;Peitao Dong;Zhihua Chen;Xuezhong Wu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS accelerometer;
- triangle cross-section beam;
- wet etching;
8.Closed-loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

机译：带电磁激励的SOI-MEMS共振加速度计的闭环控制
- 作者：Yanlong Shang;Junbo Wang;Deyong Chen;Qiang Shi;Guangbei Li
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Closed-loop control;
- SOI-MEMS;
- Resonant accelerometer;
- Electromagnetic excitation;
9.Design of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal Boundary

机译：基于Minkowski分形边界的MEMS宽带微带贴片天线的设计
- 作者：Lu Chong-ying;Xu Li-xin
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Minkowski Fractal;
- MEMS;
- Broadband;
- Microstrip Patch Antenna;
10.Design and simulation of a capacitive biaxial microaccelerometer

机译：电容性双轴微区计的设计与仿真
- 作者：Yu Liu;Zhiyu Wen;Li Chen;Hongyun Yang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS accelerometers;
- biaxial capacitive sensors;
- microstructure;
- FEA;
11.Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology

机译：基于MEMS技术的硅片微孔面板的两个制造原理图
- 作者：Shao-hua Wu;Zhan Zhao;Li-jun Guo;Li-Dong Du;Li Xiao;Zhen Fang;Jun-juan Zhao;Yun-dong Xuan
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- Micro perforated panel;
- Noise Reduction;
- Resonator;
12.Study on Anodic Bonding Process of Slender Vitreous Body

机译：细长玻璃体阳极粘接过程研究
- 作者：Pan Mingqiang;Chen Liguo;Chen Tao;Wang Zhenhua;Sun Lining
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Anodic bonding;
- Bonding process;
- Slender Vitreous body;
13.Design of a digital decimation filter for high-precision 4-order Sigma-Delta ADC

机译：高精度4阶Sigma-Delta ADC的数字抽取滤波器的设计
- 作者：Chen Weiping;Fu Qiang;Liu Xiaowei;Xiao Yan;Zhang Bin;Yang Yuheng
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Σ-? ADC;
- digital decimation filter;
- CSD;
14.Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror

机译：MEMS谐振镜的二维扫描特性研究
- 作者：ZHANG Chi;HUANG Hu;CHEN Yunhan;YOU Zheng
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- resonant mirror;
- two-dimensional scanning;
- Lissajous figure;
15.Quadrature Error and Offset Error Suppression methods for Micro-Gyroscopes

机译：微陀螺仪的正交误差和偏移误差抑制方法
- 作者：Bing Mo;Huo Zhou;Qi Zheng;Sihao Chen;Chaodong Ling
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Quadrature error;
- Offset error;
- Gyroscope;
- Suppression circuitry;
16.Application of ICP deep trenches etching in the Fabrication of FBAR Devices

机译：ICP深沟蚀刻在FBAR装置的制造中的应用
- 作者：Zhengguo Shang;Dongling Li;Shengqiang Wang;Jianhua Liu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- deep trench;
- selective ratio;
- micrograss effects;
- double protective layer;
17.Experimental study on a small flux, high pressure peristaltic micropump

机译：小磁通，高压蠕动微泵的实验研究
- 作者：Min Du;Zhengmao Lu;Xiongying Ye
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- microfluidics;
- micropump;
- pulsatile flow;
- soft lithography;
18.Effects of Different Package Structures on Thermal Properties of High Power White LED

机译：不同包装结构对高功率白色LED热特性的影响
- 作者：Zheran Sun;Darning Wu;Yajun Zhang;Jian Zhuang;Kaifang Dang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- High power white LED;
- Package;
- Thermal properties;
19.Size-dependence on Load Properties of A Silicon Nanobeam

机译：依赖硅纳米磁共振负载性能的尺寸依赖性
- 作者：Jing Wang;Hong-yan Zhang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Silicon;
- Nanobeam;
- Size-dependence;
20.An Improved Sensitivity Non-enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag Electrode

机译：一种基于纳米金改性Ag电极的改进的敏感性非酶促葡萄糖传感器
- 作者：He Jia-hong;Xu Qiang;Gao Zhi-qiang;Song Zhong-rong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- nano-gold;
- modified electrode;
- non-enzymatic sensor;
- glucose;
21.A Ground Target Positioning Method Facing Small UAVs

机译：面向小无人机的地面目标定位方法
- 作者：Guo Qi;Liu Shaopeng;Xiong Wei;Zhou Zhaoying
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- small UAVs;
- multi-images;
- forward intersection;
- Micro Electronic Mechanical Systems (MEMS);
22.Analysis of Broken Wires during Gold Wire Bonding Process

机译：金线键合过程中断线的分析
- 作者：Pan Mingqiang;Chen Tao;Chen Liguo;Sun Lining
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- wire bonding;
- gold wires;
- broken wire;
23.Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius

机译：基于曲率半径的薄膜应力梯度测量方法的精度校正
- 作者：Rong hua;Yu Chang-Ling
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- stress gradient measuring;
- curvature radius;
- accuracy correction;
24.Boron-doped nanocrystalline silicon thin films prepared by PECVD

机译：通过PECVD制备的硼掺杂的纳米晶硅薄膜
- 作者：Xiu-Qin Wang;Jian-ning Ding;Ning-Yi Yuan;Shu-Bo Wang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- PECVD;
- boron-doped;
- nanocrystalline silicon;
- crystalline fraction;
- conductivity;
25.The Out-rotator of Spin Traveling Wave Pump on Magnetic Fluid

机译：磁流体旋转波泵的外旋转器
- 作者：Meng Zhao;Jibin Zou;Jing Shang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- traveling wave magnetic field;
- magnetic fluid;
- traveling wave pump;
26.A High-Performance Closed-loop Fourth-Order Sigma-Delta Micro-machined Accelerometer

机译：高性能闭环四阶Sigma-Delta微机加速度计
- 作者：Lv Bingjun;Wang Pengfei;Wang Dongbo;Liu Junan;Liu Xiaowei
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Micro-accelerometer;
- Sigma-delta;
- Stability;
- SNR;
27.Design and Simulation of Multi-Microchannel for Thermal Wind Sensor

机译：热风传感器多微型通道的设计与仿真
- 作者：Hong Rong-sen;Lou Wen-zhong;Liu Hui-chao;Zhao Yue
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Multi-microchannel;
- Wind sensor;
- Microsystems;
28.Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors

机译：5x5压阻应力和温度传感器的设计，制造和表征
- 作者：Chuanguo Dou;Yanhong Wu;Heng Yang;Xinxin Li
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Stress sensor;
- temperature sensor;
- sensor characterization;
- flexible board;
29.Research of coupling structure between photonic crystal waveguide and dielectric taper waveguide

机译：光子晶体波导和介电锥形波导的耦合结构研究
- 作者：Ren Xiaoyuan;Feng Lishuang;Zhou Zhen;Yu Huaiyong;Deng Xuewen
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
30.A Novel Preconcentration Method for Microchip based Electrophoresis and its numerical simulation

机译：一种新型基于微芯片电泳的前浓缩方法及其数值模拟
- 作者：CAI Hao Yuan;CHEN Xing;Li Hui;CUI Da Fu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Sample stacking;
- Microchip electrophoresis;
- Numerical Modeling;
- DNA sequencing;
31.MEMS grating with interdigitated-comb structure

机译：具有交叉梳理结构的MEMS光栅
- 作者：Heng Zhang;Jun Yao;Fenggang Tao;Xuye Zhuang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- interdigitated-comb grating;
- optical sensor;
- micro-displacement;
32.Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor

机译：低温晶片水平粘接使用BCB用于谐振压力传感器
- 作者：Yuxin Li;Deyong Chen;Junbo Wang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Low temperature;
- Bisbenzocyclobutene (BCB);
- Adhesive bonding;
- Hermetically cavity sealing;
33.Low Frequency Electrochemical Accelerometer with low Noise based on MEMS

机译：基于MEMS的低噪声低频电化学加速度计
- 作者：Wentao He;Deyong Chen;Guangbei Li;Junbo Wang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Electrochemical accelerometer;
- MEMS;
- Low frequency;
- Noise;
34.Structure design of a novel micromachinined tuning fork gyroscope with high robustness

机译：具有高稳健性的新型微机械调谐叉陀螺仪的结构设计
- 作者：W. P. Chen;Y. B. Yang;Y. Yu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- tuning-fork gyroscope;
- robustness;
- temperature effect;
35.Analysis and Simulation of Micro-fluidic Inertial Switch

机译：微流体惯性开关的分析与仿真
- 作者：LIN Yi;YANG Tao;LIU Tingting;CHEN Guangyan;WANG Chao
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- micro-fluidics;
- inertial switch;
- simulation;
- microchannel;
- dynamic behavior;
36.Micro-machined Electrochemical Seismic Sensors with Interdigital Electrodes

机译：具有叉指电极的微加工电化学抗震传感器
- 作者：Guangbei Li;Deyong Chen;Wentao He;Junbo Wang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Electrochemical seismic sensor;
- Micro-machined;
- Interdidital electrodes;
37.A Flush-mounted Resonant Ice detection sensor with High Sensitivity

机译：具有高灵敏度的嵌入式谐振冰检测传感器
- 作者：Qiang Shi;Junbo Wang;Deyong Chen;Yanlong Shang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Ice sensor;
- Flush-mounted;
- Ice detection;
- Piezoelectric resonator;
- High sensitivity;
38.A Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction

机译：基于REMS模型顺序减少的精制Arnoldi算法基于Krylov子空间技术
- 作者：Le Guan;JiaLi Gao;ZhiWen Wang;GuoQing Zhang;JinKui Chu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- Refined Arnoldi algorithm;
- Krylov subspace;
- Model order reduction;
39.Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer

机译：单片3轴微型加速度计的设计与分析
- 作者：Xinghua Wang;Zhihua Chen;Dingbang Xiao
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- accelerometer;
- MEMS;
- 3-axis;
- monolithic;
- capacitance;
40.An Interface for Low-Q Micromachined Gyroscope

机译：低Q微机陀螺仪的界面
- 作者：Wang Guanshi;Mu Tao;Liu Xiaowei
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- interface;
- PI controller;
- PLL;
- frequency modulation;
41.Analysis and Improvement of a 3 Axis Accelerometer

机译：3轴加速度计的分析和改进
- 作者：Wang Shitao;Jia Yubin;Zhang Binzhen;Liu Xuesong;Huang Qinwen;Hao Yilong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- 3-axis accelerometer;
- out-of-plane movement;
- mechanical coupling;
- cross talk;
42.Study of high Sensitivity Sensor based on the principle of photoionization

机译：基于光相的原理的高灵敏度传感器研究
- 作者：Kunwang Niu;Ting Liang;Fang Yang;Qing Meng;kai Wang;Jijun Xiong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- PID;
- ionization chamber;
- bias voltage;
- drive power;
43.Development of a Portable Phosphate Detection System Using Cobalt Based Microelectrodes

机译：基于钴的微电极开发便携式磷酸盐检测系统
- 作者：Beilei Deng;Jianhua Tong;Yin Bai;Chao Bian;Guili Yan;Hong Zhang;Shanhong Xia
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- phosphate detection;
- portable;
- cobalt microelectrode;
44.DESIGN AND SIMULATION FOR TRI-AXIAL PIEZORESISTIVE MEMS ACCELEROMETER

机译：三轴压阻式MEMS加速度计的设计与仿真
- 作者：Meng Liu;Wei Zhang;Yilong Hao
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Piezoresistive accelerometer;
- FEA;
- Silicon;
- High-g force;
45.Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope

机译：用于微机械隧道陀螺仪预览-LQG控制器的模拟分析
- 作者：Liu Yifang;Wang Lingyun;Wu Dezhi;Sun Daoheng
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Micromachined tunneling gyroscope;
- Preview-LQG control;
- Tunneling effect;
- Closed-loop system;
46.A simple method for depositing DNA on the mica

机译：一种在云母上沉积DNA的简单方法
- 作者：Yuzhang Wang;Jingjie Sha;Lei Liu;Hongyan Fu;Yunfei Chen
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Atomic Force Microscope;
- DNA;
- mica;
- polylysine;
47.AIR GAP FLUX DENSITY FOR THE PLANAR MOTOR

机译：平面电机的气隙磁通密度
- 作者：Hao Xiaohong;Li Xuekang;Zhou Wu;Peng Bei
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- planar motor;
- analysis solution;
- magnetic scalar potential;
48.A Novel Micro Mirror Spectrometer and Test Experiment

机译：一种新型微镜谱仪和测试实验
- 作者：Biao. Luo;Zhi.Yu. Wen;Haitao Liu;Li Chen;Rongrong Qian
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Micro mirror;
- grating spectrometer;
- near-IR spectrometer;
- miniaturized;
- MOEMS;
- rapid scanning;
- near-infrared;
49.Simulation on S Parameter of An X-band Wilkinson Power Divider

机译：X波段Wilkinson Power Divider的S参数仿真
- 作者：Liu Hechao;Liao Xiaoping
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Wilkinson power divider;
- S parameter;
- simulation;
- odd-even mode;
- full circuit analysis;
50.Design and Simulation of Micro-power Generator based on Piezoelectric Effect for MEMS Devices Applications

机译：基于MEMS器件应用的压电效应的微发电机设计与仿真
- 作者：Xiujian chou;Yating Zhang;Maoxiang Guo;Tao Guo;Jijun Xiong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- PZT;
- micro-power;
- vibration energy;
- resonance frequency;
51.Structures and Dielectric Properties of (Pb,La)(Zr,Ti)O_3 Antiferroelectric Thick Films Prepared by different sintering procedures

机译：（Pb，La）（Zr，Ti）O_3通过不同烧结程序制备的（Zr，Ti）（Zr，Ti）o_3的介电性能
- 作者：Wenping Geng;Xiujian Chou;Yongbo Lv;Jijun Xiong;Wendong Zhang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- sol-gel process;
- antiferroelectric thick films;
- sintering procedures;
- single annealing;
- multistep annealing;
52.A high-order curvature-compensated bandgap voltage reference for micro-gyroscope

机译：微型陀螺仪的高阶曲率补偿带隙电压参考
- 作者：Li Qiang;Tan Xiaoyun;Wang Guanshi
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- micro-gyroscope;
- bandgap reference;
- high order curvature compensation;
53.Pull-in voltage of Parallel-plate Capacitor Fixed to Double Elastic Supports

机译：平行板电容器的拉伸电压固定到双弹性支撑件
- 作者：ZHOU Wu;PENG Bei;HAO Xiao Hong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- Parallel-plate Capacitor;
- Pull-in;
54.Design and Fabrication of A MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si_3N_4 Multilayered Composite Membrane

机译：基于LTO / ZnO / LTO / Si_3N_4多层复合膜的MEMS弯曲板波装置的设计与制造
- 作者：XUE Mingxin;LIU Mengwei;LI Xin;LI Junhong
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Flexural plate wave;
- ZnO piezoelectric film;
- Multilayered composite membrane;
- Interdigital transducers;
55.Phase Transition Characterization dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O_3 Antiferroelectric Thick Films

机译：相位转换表征依赖于（Pb，La）（Zr，Ti）O_3防废料厚膜的温度和直流电场
- 作者：Xiujian Chou;Miaoxuan Du;Yongbo Lv;Jun Liu;Wendong Zhang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Antiferroelectric Thick Film;
- Phase Transition;
- Temperature;
- Electric Field;
56.Simulation of characteristic of a thermoelectric power sensor based on MEMS technology

机译：基于MEMS技术的热电动力传感器特性模拟
- 作者：Liu Tong;Liao Xiaoping
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- thermoelectric power sensor;
- loss coefficient;
- MEMS;
- sensitivity;
57.The Microfluid-driven Control by Forced Wave

机译：由强制波的微流体驱动控制
- 作者：ZHU Ping
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- wave-vortex;
- tangential simple harmonic motion;
- microfluid;
58.Numerical Simulation of Multi-physical Fields Coupling and Design of a Digital Microfluidics Chip

机译：数字微流体芯片多物理场耦合与设计的数值模拟
- 作者：Tao Chen;Liguo Chen;Mingqiang Pan;Mingxiang Ling;Lining Sun
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- digital microfluidics chip;
- droplets;
- multi-physical field;
59.Analysis of Polarization-Maintaining Waveguide used in Resonance Integrated Optical Gyro

机译：谐振集成光学陀螺仪中使用的偏振维持波导分析
- 作者：LIU Huilan;LI Ruya;YU Huaiyong;WANG Junjie;JIAO Zhichao
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
60.Study of a MEMS Short-circuit Fuse based on Electro-thermal Theory

机译：基于电热理论的MEMS短路保险丝研究
- 作者：Y. Zhao;D.G. Li;W.Z. Lou;L.F. Zhang;J.H. Li;M.B. Fang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- MEMS;
- fuse;
- Igniter;
- electro-thermal;
61.Trial-constructing a novel image of AAO template

机译：试验构建AAO模板的新颖形象
- 作者：Hongmei Zheng;Yucheng Wu;Xinmin Huang;Jiewu Cui;Yan Wang
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- Anodic aluminium oxide (AAO);
- Nano-template;
- High purity aluminium;
- Electrochemical deposition method;
62.New Isolation Optimization Method of RF MEMS Capacitive Switches

机译：RF MEMS电容开关的新隔离优化方法
- 作者：Junshou Chen;Zheng You;Yong Ruan;Muzhi Hu
- 会议名称：《Chinese Society of Micro-Nano Technology.》 | 2012年
- isolation;
- microelectromechanical systems (MEMS);
- switches;
- radio frequency (RF);