扩散气体流量对单晶硅太阳电池性能的影响

摘要

160 mm × 160 mm monocrystalline silicon wafers were used as the raw materials of the experiments in this paper.The relationship between the flow of the little nitrogen and the oxygen and the square resistance,uniformity and the minority carrier lifetime were researched.The relationship between the flow of the little nitrogen and the oxygen and the electric properties of the solar cell were researched also.Through changing the flow of the little nitrogen and the oxygen,the best ratio of the flow of little nitrogen and the oxygen was found out.The experiment proves that when the flow of the little nitrogen is 1 100 mL/min and the flow of the oxygen is 500 mL/min,the conversion efficiency of the solar cell is the highest.%以160 mm×160 mm规格单晶硅片为实验原材料,分别研究了小氮和氧气流量对薄层方块电阻的大小、均匀性、扩散后硅片少子寿命的影响,以及最终对单晶太阳电池开路电压(Voc)、短路电流(Isc)、转换效率(η)等电性能参数的影响.通过逐步改变小氮和氧气流量,找出小氮和氧气流量的最佳比值,优化了扩散工艺.实验证明,小氮流量在1 100mL/min,氧气流量在500 mL/min时,太阳电池的转化效率最高.