SOI技术的机遇和挑战

摘要

本文较为系统地描述了SOI技术的特点，分析了SOI技术中存在的问题和发展的潜力，最后得出了SOI技术将在特征尺寸小于0.1 μm、电源电压小于1 V的新一代集成电路技术中得到广泛应用。%The potential advantages and shortcomings of SOI technology wer discussed in detail in this paper. The trends of developing CMOS/SOI integrated circuits and SOI materials are presented also. At last, the conclusion which the CMOS/SOI technology will become the main technology of IC when the dimension is smaller than 0.1 micron and the supply voltage is lower than 1 voltage is given.