开槽冰冻固结磨料抛光微晶玻璃的工艺研究

摘要

Mould pressing method was used to groove the micron—sized α-A12O3 ice fixed abrasive polishing pad. The polishing process of glass—ceramics by ice —fixed —abrasive polishing pad with grooves was researched through orthogonal test of four factors and three levels, and the results were compared with the ice—fixed —abrasive polishing pad without grooves under the same experimental conditions. The results show that the material removal ratio increases about 40% in grooved condition, and the surface topography of glass — ceramics is improved slightly although with little scratches. Spindle speed influences the material removal ratio more greatly.%采用成形模具热压法给微米级α-A12O3冰冻固结磨料抛光垫开槽.设计四因素三水平正交试验,对开槽冰冻固结磨料抛光垫抛光微晶玻璃的工艺进行了研究,与同样试验条件下未开槽冰冻固结磨料抛光垫的抛光效果进行了对比分析.结果表明:开槽情况下的去除率比未开槽情况下的去除率提高40％左右,微晶玻璃表面形貌略有改善但出现划痕现象,主轴转速对材料去除率影响更为显著.