单轴微机械热对流加速度计温度场分析

摘要

In order to optimize structure design and fabrication of the MEMS convective accelerometer, and to improve its precision and sensibility, the technologies of sacrificial layer and Si-SiO2←→SiOa-Si amalgamations were used to make models, and the temperature distributions were discussed. Analytic results show that the accelerometer has the highest sensibility when the distance between heater and detectors is in [430 |xm, 440 μm].%为优化微机械热对流加速度计的结构布置和加工流程,提高其测量精度和灵敏度,采用了成本低廉、技术成熟的“牺牲层”技术和Si-SiO2-SiO2-Si键合技术设计制作了六面体腔型式的微机械热对流加速度计模型,并通过对这种结构的模型进行温度场分析.当微机械热对流加速度计具有最高的灵敏度时,热敏元件与加热元件的最佳距离区间为[430 μm,440 μm].