含有本征SiGe层的SiGe异质结双极晶体管集电结耗尽层宽度模型

摘要

By solving Poisson equation, models of voltage and electric field distribution are build respectively in collector junction depletion layer of SiGe HBT (heterojunction bipolar transistor) with intrinsic SiGe layer. On this basis, models of the collector junction depletion layer width and delay time are obtained. Applying MATLAB, the impact of physical and electrical parameters on SiGe HBT collector junction depletion layer width and depletion delay time are quantitatively analyzed. When base doping concentration and collector junction reverse bias are large, the depletion delay time is quite long. But, when base doping external diffusion depth and collector region doping are large, the depletion delay time is quite short.%本文分别建立了含有本征SiGe层的SiGe HBT(异质结双极晶体管)集电结耗尽层各区域的电势、电场分布模型,并在此基础上,建立了集电结耗尽层宽度和延迟时间模型,对该模型进行了模拟仿真,定量地分析了SiGe HBT 物理、电学参数对集电结耗尽层宽度和延迟时间的影响,随着基区掺杂浓度和集电结反偏电压的提高,集电结耗尽层延迟时间也随之增大,而随着集电区掺杂浓度的提高和基区Ge组分增加,集电结耗尽层延迟时间随之减小.