ACTIVE MICROVIBRATION CONTROL INBASE-ISOLATED PRECISION MANUFACTURING FACILITIES WITHSMART STRUCTURE USING PIEZOELECTRIC ACTUATORS

摘要

In order to achieve more perfect vibration-free environment in base-isolated precision manufacturingfacilities, a smart structure was tested for overall active microvibration control in a base-isolated 2-storysteel frame building model of a 5×3×4H m external size and a 6,900 kg total mass which was supported byfour multistage rubber bearings. In the building model, 20 piezoelectric actuators were attached to thecolumns and the beams, and four horizontal actuator units consisting of two piezoelectric actuators eachand four vertical ones of the same type were installed between the bottom of the superstructure and thefoundation. The controller was designed by a model-matching method. The tests showed that the smartstructure could effectively control three-dimensional microvibrations generated in the building model andexcited by external disturbances.