IN-PLANE STRETCHING IN MEMS ACTUATED DEFORMABLE MIRRORS

摘要

We consider the response of a continuously deformable mirror with discrete MEMS actuators. The mirror itself is described with a geometrically exact shell model incorporating both flexural and extensional strains, while the MEMS actuators are represented as discrete elements subject to a time-dependent voltage. A reduced-order model is developed through a Galerkin reduction and the resulting equations are subjected to the method of multiple scales. The response of the system is then analyzed to uncover the ability of the system follow desired mirror profiles.