IMPACT OF SUBSTRATE THICKNESS EFFECTS ON CMOS LC-VCO

摘要

In this paper, the effects of substrate thickness on LC-voltage controlled oscillator (LC-VCO) were investigated. In order to verify impact of substrate thickness on the performance, five different substrate thicknesses were obtained. Due to the substrate skin effect (SSE), the experimental results showed that symmetrical spiral inductor with substrate thickness of 50-μm demonstrated smaller inductance of 8.7% and lower quality factor of 4.5% than the ones of substrate thickness of 280-μm, resulting in an increase in oscillating frequency of 5.8% at a control voltage of IV.