A Study of the Geometrical Correction Factor on the Sensitivity of the Transversal Piezoresistive Sensors

摘要

The sensitivity of four-terminal devices like Hall and piezoresistive sensors is very dependent on its geometric parameters. This dependence is modeled by the Geometrical Correction Factor (G). The majority of these studies take very time-consumption analytical calculations for the analysis of G. In order to simplify this analysis, we present numerical analysis for the most common geometrical forms of four-terminal devices and propose suitable aspect ratios of its geometric parameters for maximization of G. This result is general for any four-terminal-shaped sensors. Experimental result of a new topology of pressure sensor is also presented, which maximizes G in a comparison with conventional four-terminal devices and also improves its sensitivity.