首页> 外文会议>Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on >Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer
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Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer

机译:由三自由度陀螺仪和三自由度加速度计组成的涡旋惯性传感器的设计与制造

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This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.
机译:本文报道了一种新颖的涡旋多轴惯性传感器,它可以同时检测角速率的三个分量和线性加速度的三个分量。它使用涡流气流代替传统的线性气流作为惯性质量来检测角速度和线性加速度。在该实施方式中,通过将气体沿相反的方向通过两个相对的喷嘴孔口喷射到圆形腔室中而形成涡旋。通过正确配置热敏电阻可以实现多轴检测。测试结果表明,陀螺仪和加速度计均可达到中等精度,证明了该装置的可行性。

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