Peculiarities of Zn diffusion frompolymer spin-on films in AlGaAs

机译：Zn扩散的特点来自聚合物旋转膜在Algaas中

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Zn diffusion into Al_xGa_(1-x)As from polymer spin-on films has been investigated. An increase in Zn diffusivity has been observed with increase in the content of Al in AlGaAs compounds. The efect has been related to more coefficient of self-diffusion for Al than for Ga. The availability of the near-surface layer enriched with Al in epitaxial AlGaAs wafers have been found to result in poor reproducible diffusion characteristics.

机译：已经研究了Zn扩散到来自聚合物旋膜的Al_xga_（1-x）已经研究过。通过藻类化合物中的Al含量增加，已经观察到Zn扩散率的增加。 EFECT与Al的更多的自扩散系数相关。已经发现富含HAR在外延藻类晶片中富含Al的近表面层的可用性导致可再现可再现扩散特性。

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《Symposium on defect and impurity engineered semiconductors》|1998年||共6页
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A.V.Kamanin; A.M.Mintairov; N.M.Shmidt; Materials Research Society;
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中图分类半导体器件制造工艺及设备;
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Peculiarities of Zn diffusion frompolymer spin-on films in AlGaAs

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