Peculiarities of Zn diffusion frompolymer spin-on films in AlGaAs

机译：AlGaAs中聚合物旋涂膜中Zn扩散的特殊性

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Zn diffusion into Al_xGa_(1-x)As from polymer spin-on films has been investigated. An increase in Zn diffusivity has been observed with increase in the content of Al in AlGaAs compounds. The efect has been related to more coefficient of self-diffusion for Al than for Ga. The availability of the near-surface layer enriched with Al in epitaxial AlGaAs wafers have been found to result in poor reproducible diffusion characteristics.

机译：研究了Zn从聚合物旋涂膜扩散到Al_xGa_（1-x）As中的过程。随着AlGaAs化合物中Al含量的增加，观察到Zn扩散率的增加。这种效果与Al的自扩散系数比Ga的扩散系数有关。外延AlGaAs晶片中富含Al的近表面层的可用性已导致可复制的扩散特性较差。

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《Defect and impurity engineered semiconductors II》|1998年|p.215-220|共6页
会议地点 San Francisco CA(US)
作者
A.V.Kamanin; A.M.Mintairov; N.M.Shmidt;
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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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入库时间 2022-08-26 14:19:56

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Peculiarities of Zn diffusion frompolymer spin-on films in AlGaAs

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