The Effect of Hydrogen Dilution on the Morphology of Carbon Nanowalls Decorated Carbon Nanotubes Deposited by Hot-Wire r.f. Plasma Enhanced Chemical Vapour Deposition

摘要

An investigation on the effects of hydrogen (H_2) gas dilution on the morphology and growth of carbon nanowalls (CNWs) decorated carbon nanotubes (CNTs) by hot-wire r.f. plasma enhanced chemical vapour deposition technique is presented. With the assistance of nickel nanoparticle catalyst, CNWs decorated CNTs formed only under the presence of 25% of H_2 gas, relative to the methane (CH_4) gas precursor. By varying the amount of H_2 incorporated with CH_4, the role of H_2 dilution in the development of CNWs decorated CNTs was studied. Based on the FESEM and HRTEM results, it is hypothesized that H_2 density and relative carbon radical concentration are the important parameters for the deposition of CNWs decorated CNTs. The effect of H_2 dilution on the formation of CNWs decorated CNTs is presented.