Ar-dilution effects on the elastic and structural properties of hydrogenated hard carbon films deposited by plasma-enhanced chemical vapor deposition

摘要

Results of systematic investigations of the elastic and structural properties of hydrogenated amorphous carbon (a-C:H) films as a function of deposition conditions are reported. A multi-technique approach has been adopted, combining Brillouin light scattering (BLS), Raman spectroscopy and X-ray reflectivity (XRR). The mass density of the films has been determined by XRR, while BLS has been adopted to test the elastic properties of the films. As the fraction of methane in the feed gas is increased, the deposited film shows both a higher phase velocity of the surface Rayleigh wave, and an increasing density, thus suggesting the synthesis of a harder material. This hardening effect has been attributed to the occurrence of a higher degree of structural order in the sp~2 lattice, as suggested by Raman scattering measurements. These experimental finding are related to the different chemical composition of plasmas with different CH_4/Ar ratios.