Influence of Deposition Time on Amorphous Carbon Thin Films Performance with Aerosol-Assisted Chemical Vapor Deposition

摘要

Pure amorphous Carbon (a-C) thin films had been deposited by Aerosol-Assisted CVD (AACVD) onto glass substrate in Argon atmosphere. The camphor oil was chosen as the carbon precursor to prepare the a-C thin films with the deposition time of 15 minutes, 30 minutes, 45 minutes, 60 minutes and 75 minutes. The electrical, optical and structural properties of the deposited a-C were discussed by using the current-voltage solar simulator system, UV-Vis-Nir spectrophotometer and Raman spectroscope respectively. For the electrical characterization, the samples showed the photoresponse performance when being illuminated under AM 1.5 illuminations: 100 mW/cm~2, 25°C. Transmittance value for the a-C thin films was also considered high ～80% and the structural analysis by using Raman spectroscope exhibit two main peaks known as the D-peak and G-peak which is typical for the a-C.