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Photosensitive polyimides without side chain: negative-tone reaction development patterning

机译:没有侧链的光敏聚酰亚胺:负色调反应开发图案

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Photosensitive polymers have been widely used in various industries, such as photoresists for patterning of integrated circuits (ICs), buffer coat layers for IC chips and interlayer dielectric films in electronics industry, and manufacturing of printing plates, color filters, optical waveguides.1'2 Different properties are required for such the applications of photosensitive polymers, and the most appropriate molecular designs should be adopted for each application. In electronics packaging (Jisso) like buffer coat layers and interlayer dielectrics, though requirement for resolution is not strict, high thermal, mechanical and insulating properties are required for photosensitive polymers because of permanent utilization of patterns without removing. Therefore, photosensitive polymers based on engineering plastics, known as high-performance polymers, have been studied, and especially, photosensitive polyimides have received extensive attentions because of their excellent properties.3 Conventional photosensitive polyimides have utilized derivatives of polyimide precursor, poly(amic acid), or functionalized polyimides as polymer components.4"8 However, preparation of these polymers often requires complicated and high-cost synthetic routes. In addition, high temperature post-curing is needed for imide ring formation when poly(amic acid) derivatives are used as the polymer components.
机译:光敏聚合物已广泛用于各种行业,例如光致抗蚀剂用于图案化集成电路(IC),用于IC芯片的缓冲涂层和电子工业中的层间介电薄膜,以及印刷板的制造,滤色器,光波导。 2感光性聚合物的应用需要2种不同的性能,并且应为每种应用采用最合适的分子设计。在电子包装(jisso)中,如缓冲涂层和层间电介质,但由于在不除去的情况下永久利用图案,光敏聚合物所需的要求不是严格的,高热,机械和绝缘性能。因此,已经研究了基于工程塑料的光敏聚合物,已被称为高性能聚合物,尤其是光敏聚酰亚胺,由于它们优异的性能,因此具有广泛的关注.3常规的光敏聚酰亚胺利用聚酰亚胺前体,聚酰胺(氨基酸)的衍生物)或官能化的聚酰亚胺作为聚合物组分.4“8然而,这些聚合物的制备通常需要复杂和高成本的合成途径。此外,当聚(氨基酸)衍生物是时,酰亚胺环形成需要高温后固化。用作聚合物组分。

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