Dynamic scan operation of actinic EUVL mask blank inspection system with TDI mode - (PPT)

摘要

Actinic dark-field mask blank inspection tool with Time Delay and Integration (TDI) mode was achieved. Threshold method is used to identify phase defects. Sensitivity of detecting small defect such as 1.5 nm in height and 60 nm in width was confirmed, but capture rate must be improved. Inspection results were compared with non-actinic tool. Defects detected only with the actinic system were mostly pit phase defects smaller than 100 nm while small particles were detected only with non-actinic tool. Possibility of detecting phase defects on a mask with absorber patterns was demonstrated. Activities planned: Inspection signal noise reduction for fast TDI operation. Collect/compile inspection data of multilayer native defects.