Characteristic of main chain decomposable STAR shaped polymer for EUV resist - (PPT)

摘要

Novel PHOMS STAR polymer was considered. The thermal property of the exposed and unexposed area was also investigated through the thermal flow method, Linear polymer: T_f increase in exposed area STAR polymer: T_f decrease in exposed area T_f decrease with exposure was confirmed as well as PHS STAR. Promoted acid diffusion coefficient with exposure was implied. From EUV evaluation, Merit of main chain decomposition system was confirmed for PHOMS STAR as well as PHS STAR polymer. The STAR polymer exhibited promising lithographic performance with ADT and MET evaluation. From dissolution characteristic, STAR polymer showed non-linear dissolution behavior at dissolution image boundary. It might be suggested that the STAR possess the possibility for a variable acid diffusion coefficient. ND-STAR showed much less contrast, i.e., main chain decomposition may play important role on de-protection efficiency. From outgassing study PHOMS resist was approved both RGA and WS contamination thickness test.