Effect of molecular weight on the EUV-printability of main chain scission type polymers (vol 53, 891, 2020)

Rathore Ashish; Pollentier Ivan; Singh Harpreet; Fallica Roberto; De Simone Danilo; De Gendt Stefan

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Effect of molecular weight on the EUV-printability of main chain scission type polymers (vol 53, 891, 2020)

机译：分子量对主链裂殖型聚合物EUV印刷性的影响（Vol 53,891,2020）

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Correction for 'Effect of molecular weight on the EUV-printability of main chain scission type polymers' by Ashish Rathore et al., J. Mater. Chem. C, 2020, DOI: ; 10.1039/c9tc06482f.

机译：ASHISH Rathore等人的“分子量对主要链裂化型聚合物EUV印刷性”的影响校正。化学。 C，2020，DOI：; 10.1039 / C9TC06482F。

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《Journal of Materials Chemistry, C. materials for optical and electronic devices》 |2020年第17期|共1页
作者
Rathore Ashish; Pollentier Ivan; Singh Harpreet; Fallica Roberto; De Simone Danilo; De Gendt Stefan;
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作者单位

Katholieke Univ Leuven Dept Chem Celestijnenlaan 200 B-3001 Leuven Belgium;

Panjab Univ Ctr Nanosci &

Nanotechnol Chandigarh 160014 India;

Panjab Univ Ctr Nanosci &

Nanotechnol Chandigarh 160014 India;

Panjab Univ Ctr Nanosci &

Nanotechnol Chandigarh 160014 India;

Katholieke Univ Leuven Dept Chem Celestijnenlaan 200 B-3001 Leuven Belgium;

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正文语种 eng
中图分类物理化学（理论化学）、化学物理学;
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1. Effect of molecular weight on the EUV-printability of main chain scission type polymers (vol 53, 891, 2020) [J] . Rathore Ashish, Pollentier Ivan, Singh Harpreet, Journal of Materials Chemistry, C. materials for optical and electronic devices . 2020,第17期

机译：分子量对主链裂殖型聚合物EUV印刷性的影响（Vol 53,891,2020）
2. Effect of initial molecular weight distribution on pattern formation of main-chain-scission-type resists [J] . Nakajima Ayako, Hoshino Manabu, Kozawa Takahiro Japanese journal of applied physics . 2021,第5期

机译：初始分子量分布对主链裂化型抗蚀剂图案形成的影响
3. Effects of molecular weight and dispersity on performance of main-chain-scission-type resist [J] . Nakajima Ayako, Hoshino Manabu, Hashimoto Masakazu, Japanese journal of applied physics . 2019,第2期

机译：分子量和分散度对主链断裂型抗蚀剂性能的影响
4. A Novel Main Chain Scission Type Photoresists for EUV Lithography [C] . A. Shirotori, M. Hoshino, D. De Simone, International Conference on Extreme Ultraviolet Lithography . 2020

机译：用于EUV光刻的新型主链群体光致抗蚀剂
5. Main chain type benzoxaine polymers for high performance applications [D] . Chernykh, Andrey 2009

机译：适用于高性能应用的主链型苯并x嗪聚合物
6. Synthesis of Ultrahigh Molecular Weight Polymers Containing Reactive Functionality with Low PDIs by Polymerizations of Long-Chain α-Olefins in the Presence of Their Nonconjugated Dienes by Cp*TiMe2(O-26-iPr2C6H3)–Borate Catalyst [O] . Kotohiro Nomura, Sarntamon Pengoubol, Wannida Apisuk 2020

机译：Cp * TiMe2（O-26-iPr2C6H3）-硼酸盐催化剂在长链α-烯烃非共轭二烯存在下的聚合反应合成具有低PDI活性的超高分子量聚合物
7. Effect of molecular weight on the EUV-printability of main chain scission type polymers [O] . Ashish Rathore, Ivan Pollentier, Harpreet Singh, 2020

机译：分子量对主链裂化型聚合物EUV印刷性的影响
8. Synthesis of Side Chain Liquid Crystal Polymers by Living Ring Opening MetathesisPolymerization. 3. Influence of Molecular Weight, Interconnecting Unit and Substituent on the Mesomorphic behavior of Polymers with Laterally Attached Mesogens [R] . Pugh, C., Schrock, R. R. 1992

机译：活环开环复分解聚合合成侧链液晶聚合物。 3.分子量，互连单元和取代基对具有横向附着的中间体的聚合物的介晶行为的影响

Effect of molecular weight on the EUV-printability of main chain scission type polymers (vol 53, 891, 2020)

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