Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator

摘要

In this paper, an analytical model of the mechanical behavior of a resonant beam sensor actuated by a bent beam thermal actuator is presented. The system is divided into two main subsystems: bent beam actuator and resonant beam sensor. Each subsystem is studied separately and then the model of the original system is derived based on the models of subsystems.