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Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS

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1.A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials

机译：MEMS / NEMS薄膜材料纳米机械表征的关键比较与发展
- 作者：Johnny H. He;H. R. Le;J. K. Luo;Y. Q. Fu;D. F. Moore
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Cantilevers;
- MEMS/NEMS;
- Micro-/Nano-Mechanical Characterization;
- Nano-indentation;
- Resonance Frequency;
2.A MEMS sensor for the measurement of density-viscosity for oilfield applications

机译：用于测量油田应用密度粘度的MEMS传感器
- 作者：Christopher Harrison;Seungoh Ryu;Anthony Goodwin;Kai Hsu;Eric Donzier;Frederic Marty;Bruno Mercier
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
3.A MEMS Sensor for the Measurement of Density-Viscosity for Oilfield Applications

机译：用于测量油田应用密度粘度的MEMS传感器
- 作者：Christopher Harrison;Seungoh Ryu;Anthony Goodwin;Kai Hsu;Eric Donzier;Frederic Marty;Bruno Mercier;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
4.A Critical Comparison and Development of Nano-Mechanical Characterization of MEMS/NEMS Thin Film Materials

机译：MEMS / NEMS薄膜材料纳米机械表征的关键比较与发展
- 作者：Johnny H. He;H. R. Le;J.K. Luo;Y.Q. Fu;D. F. Moore;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- cantilevers;
- MEMS/NEMS;
- micro-/nano- mechanical characterization;
- nano-indentation;
- resonance frequency;
5.The Ultra Fine Dynamics of MEMS as revealed by the Polytec Micro System Analyzer

机译：多贸易微系统分析仪揭示了MEMS的超细动态
- 作者：Eric M. Lawrence;Christian Rembe;Sebastian Boedecker;Huantong Zhang;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- laser doppler vibrometer;
- mechanical;
- characterization;
- vibration;
- microscopic;
- rf switch;
6.Reliability of microcantilevers in liquid environments

机译：液体环境中微电子的可靠性
- 作者：S. Mubassar Ali;Susan C. Mantell;Ellen K. Longmire;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS reliability;
- fatigue;
- cyclic stress;
- microfluidics. liquid environments;
- stress-corrosion cracking;
- resonating sensors;
7.Galvanic corrosion: a microsystems device integrity and reliability concern

机译：电镀腐蚀：微系统设备完整性和可靠性问题
- 作者：David C. Miller;William L. Hughes;Zhong L. Wang;Ken Gall;Conrad R. Stoldt
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- galvanic corrosion;
- anodic oxidation;
- MEMS;
- hydrofluoric acid;
- performance;
- reliability;
8.Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator

机译：由弯曲梁热执行器致动的基于MEMS的谐振传感器的建模与分析
- 作者：Pezhman A. Hassanpour;William L. Cleghorn;Ebrahim Esmailzadeh;James K. Mills
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- analytical modeling;
- beam vibration;
- concentrated mass;
9.Guidelines for reliability testing of microelectromechanical systems in military applications

机译：军事应用中微机电系统可靠性测试指南
- 作者：Robert Mason;Larry Gintert;Marc Rippen;Don Skelton;James Zunino;Ivars Gutmanis
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- reliability;
- MEMS;
- MSTs;
- standards;
- reliability;
- guidelines;
- U.S.Army;
10.Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications

机译：用于无源微血管应用中使用的微机械谐振力传感器的机械模型
- 作者：Issam B. Bahadur;James K. Mills
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- resonant sensing;
- DETF;
- microgripper;
- microassembly;
- microleverage;
- snap fit;
- Q factor;
11.Guidelines for Reliability Testing of Microelectromechanical Systems in Military Applications

机译：军事应用中微机电系统可靠性测试指南
- 作者：Robert Mason;Larry Gintert;Marc Rippen;Don Skelton;James Zunino;Ivars Gutmanis;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- reliability;
- MEMS;
- MSTs;
- standards;
- reliability;
- guidelines;
- U.S. army;
12.Development of a Mechanical Model for a Micromachined Resonant Force Sensor used in Passive Microgripping Applications

机译：用于无源微血管应用中使用的微机械谐振力传感器的机械模型
- 作者：Issam B. Bahadur;James K. Mills;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- resonant sensing;
- DETF;
- microgripper;
- microassembly;
- microleverage;
- snap fit;
- Q factor;
13.Reliability of microcantilevers in liquid environments

机译：液体环境中微电子的可靠性
- 作者：S. M. Ali;Susan C. Mantell;Ellen K. Longmire
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS Reliability;
- fatigue;
- cyclic stress;
- microfluidecs;
- liquid environments;
- stress-corrosion cracking;
- resonating sensors;
14.GALVANIC CORROSION: A MICROSYSTEMS DEVICE INTEGRITY AND RELIABILITY CONCERN

机译：电镀腐蚀：微系统设备完整性和可靠性问题
- 作者：David C. Miller;William L. Hughes;Zhong Lin Wang;Ken Gall;Conrad R. Stoldt;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- galvanic corrosion;
- anodic oxidation;
- MEMS;
- hydrofluoric acid;
- performance;
- reliability;
15.The ultra fine dynamics of MEMS as revealed by the Polytec micro system analyzer

机译：多贸易微系统分析仪揭示了MEMS的超细动态
- 作者：Eric M. Lawrence;Christian Rembe;Sebastian Boedecker;Huantong Zhang
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- laser Doppler vibrometer;
- mechanical;
- characterization;
- vibration;
- microscopic;
- RF Switch;
16.Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator

机译：由弯曲梁热执行器致动的基于MEMS的谐振传感器的建模与分析
- 作者：Pezhman A. Hassanpour;William L. Cleghorn;Ebrahim Esmailzadeh;James K. Mills;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- analytical modeling;
- beam vibration;
- concentrated mass;
17.Stiction force estimation from attachment length and electrostatic measurements on cantilever beams

机译：悬臂梁附着长度和静电测量的静力估计
- 作者：Enakshi Bhattacharya;Souvik Basu;Anil Prabhakar
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Surface micromachining;
- pull-out voltage;
- stiction force;
- attachment length;
- surface energy;
18.Stiction Force Estimation from Attachment Length and Electrostatic Measurements on Cantilever Beams

机译：悬臂梁附着长度和静电测量的静力估计
- 作者：Enakshi Bhattacharya;Souvik Basu;Anil Prabhakar;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- surface micromachining;
- pull-out voltage;
- stiction force;
- attachment length;
- surface energy;
19.Experimental and Theoretical Investigation of Contact Resistance and Reliability of Lateral Contact type Ohmic MEMS Relays

机译：横向接触式欧姆MEMS继电器接触电阻和可靠性的实验与理论研究
- 作者：Lia Almeida;Koji Ishikawa;Q. Yu;R. Jackson;R. Ramadoss;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- MEMS relay;
- multi-contact relay;
- MEMS reliability;
- Ohmic-contact relay;
- metalMUMPS;
- comb-drive actuator;
- stiction in MEMS;
- asperity contact model;
20.Failure mechanisms of DC and capacitive RF MEMS switches

机译：DC和电容式RF MEMS开关的故障机制
- 作者：Steven T. Patton;Jeffrey S. Zabinski
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- tribology;
- microelectromechnaical systems;
- RF switches;
- adhesion;
- contact resistance;
- reliability;
- durability;
- shorting;
- parasitic dielectric charging;
- electrostatic force;
21.Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays

机译：横向接触式欧姆MEMS继电器接触电阻和可靠性的实验与理论研究
- 作者：Lia Almeida;Koji Ishikawa;Q. Yu;R. Jackson;R. Ramadoss
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- MEMS Relay;
- Multi-contact Relay;
- MEMS Reliability;
- Ohmic-Contact Relay;
- MetalMUMPS;
- Momb-drive Actuator;
- Stiction in MEMS;
- asperity contact model;
22.Failure mechanisms of DC and capacitive RF MEMS switches

机译：DC和电容式RF MEMS开关的故障机制
- 作者：Steven T. Pattern;Jeffrey S. Zabinski;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- tribology;
- microelectromechanical systems;
- RF switches;
- adhesion;
- contact resistance;
- reliability;
- durability;
- shorting;
- parasitic dielectric charging;
- electrostatic force;
23.A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS

机译：气密真空粘合MEMS中真空质量和寿命预测的新模型
- 作者：A.Bonucci;S.Guadagnuolo;A. Caterino;A. Conte;M. Moraja
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- getter;
- MEMS;
- vacuum;
- pressure;
- quality factor;
24.Electrical breakdown across micron scale gaps in MEMS structures

机译：MEMS结构中微米尺度差距的电击
- 作者：Fabian W. Strong;Jack L. Skinner;Paul M. Dentinger;Norman C. Tien
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Electrical breakdown;
- Paschen curve;
- MEMS microswitch;
- surface micromachining;
25.Infrared laser deposition of Teflon coatings on microstructures

机译：Teflon涂层的红外激光沉积在微结构上
- 作者：M. R. Papantonakis;R. F. Haglund Jr
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Pulsed laser deposition;
- resonant infrared vaporization;
- poly(tetrafluortehylene);
- Teflon;
- free-electron laser;
26.Hermeticity tests on organically sealed micro-packages using FTIR spectroscopy

机译：使用FTIR光谱法对有机密封的微包进行闭合性测试
- 作者：D. Veyrie;J.-L. Roux;F. Pressecq;A. Tetelin;C. Pellet
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS micro-packaging;
- Hermeticity;
- Organic adhesive bonding;
- FTIR spectroscopy;
27.Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device

机译：用于弹簧质量MEMS装置的动态长期可靠性测试的实验装置和软件设计
- 作者：Phillip L. Reu;Danelle M. Tanner;David S. Epp;Ted B. Parson;Brad L. Boyce;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- reliability;
- resonant frequency;
- dynamic testing;
- modal testing;
- LDV;
- doppler;
- MEMS;
- fatigue;
- aging;
28.Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device

机译：用于弹簧质量MEMS装置的动态长期可靠性测试的实验装置和软件设计
- 作者：Phillip L. Reu;Danelle M. Tanner;David S. Epp;Ted B. Parson;Brad L. Boyce
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Reliability;
- resonant frequency;
- dynamic testing;
- modal testing;
- LDV;
- Doppler;
- MEMS;
- fatigue;
- aging;
29.Electrical Breakdown across Micron Scale Gaps in MEMS Structures

机译：MEMS结构中微米尺度差距的电击
- 作者：Fabian W. Strong;Jack L. Skinner;Paul M. Dentinger;Norman C. Tien;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- electrical breakdown;
- paschen curve;
- MEMS microswitch;
- surface micromachining;
30.Infrared-laser deposition of Teflonreg; coatings on microstructures

机译：Teflon®涂层对微结构的红外激光沉积
- 作者：M. R. Papantonakis;R. F. Haglund Jr.;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- pulsed laser deposition;
- resonant infrared vaporization;
- poly(tetrafluorethylene);
- Teflonamp;
- reg;
- free-electron laser;
31.Hermeticity tests on organically sealed micro-packages using FTIR spectroscopy

机译：使用FTIR光谱法对有机密封的微包进行闭合性测试
- 作者：D. Veyrie;J.-L. Roux;F. Pressecq;A. Tetelin;C. Pellet;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS micro-packaging;
- hermeticity;
- organic adhesive bonding;
- FTIR spectroscopy;
32.Design and fabrication of the degradation level monitoring sensor for power transformer insulating oil

机译：电力变压器绝缘油降解水平监测传感器的设计与制造
- 作者：Sunghyun Kim;Yiseok Kim;Jooran Yang;Sangjin Kwon;Sekwang Park;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- degradation;
- insulating oil;
- power transformer;
- capacitive;
33.Design and fabrication of the degradation level monitoring sensor for power transformer insulating oil

机译：电力变压器绝缘油降解水平监测传感器的设计与制造
- 作者：Sunghyun Kim;Yiseok Kim;Jooran Yang;Sangjin Kwon;Sekwang Park
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Degradation;
- insulaton oil;
- power transformer;
- capacitive;
34.Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures

机译：新的组合低相干干涉测量谱谱分辨反射谱与高分辨率拉曼光谱相容，用于MEMS结构的非破坏性表征
- 作者：Wojciech J. Walecki;Talal Azfar;Alexander Pravdivstev;Manuel Santos II;Tim Wong;Aiguo Feng;Ann Koo;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- raman spectroscopy;
- low coherence interferometry;
35.Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures

机译：新的组合低相干干涉测量谱谱分辨反射谱与高分辨率拉曼光谱相容，用于MEMS结构的非破坏性表征
- 作者：Wojciech J. Walecki;Talal Azfar;Alexander Pravdivstev;Manuel Santos II;Tim Wong;Aiguo Feng;Ann Koo
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Raman Spectroscopy;
- Low coherence Interferometry;
36.Experimental and Computational Study on Laser Heating of Surface Micromachined Cantilevers

机译：表面微加热器激光加热的实验与计算研究
- 作者：Leslie M. Phinney;Olga Blum Spahn;C. Channy Wong;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- laser damage of MEMS;
- optical MEMS;
- MOEMS;
- polycrystalline silicon;
37.High and stable Q-factor in resonant MEMS with Getter film

机译：高稳定的Q系 - 谐振MEMS与吸气膜
- 作者：A. Conte;M. Moraja;G. Longoni;A. Fourrier;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- getter;
- MEMS;
- Q-factor;
- vacuum packaging;
- vacuum bonding;
- fusion bonding;
38.High g testing of MEMS devices

机译：MEMS器件的高G测试
- 作者：Robert P. OReilly
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
39.Experimental and computational study on laser heating of surface micromachined cantilevers

机译：表面微加热器激光加热的实验与计算研究
- 作者：Leslie M. Phinney;Olga B. Spahn;C. Channy Wong
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Laser damage of MEMS;
- optical MEMS;
- MOEMS;
- polycrystalline silicon;
40.High G Testing of MEMS Devices

机译：MEMS器件的高G测试
- 作者：Robert P. OReilly;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
41.High and stable Q-factor in resonant MEMS with Getter film

机译：高稳定的Q系 - 谐振MEMS与吸气膜
- 作者：A. Conte;M. Moraja;G. Longoni;A. Fourrier
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- getter;
- MEMS;
- Q-factor;
- vacuum packaging;
- vacuum bonding;
- fusion bonding;
42.Temperature compensation analysis of liquid lens for variable-focus control

机译：可变聚焦控制液体透镜的温度补偿分析
- 作者：Shu-Jung Chen;Tsai-Lin Tai;Chih-Hsiung Shen
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Liquid lens;
- electrowetting;
- temperatrue comensation;
43.Wafer bonding for 3D integration of MEMS/CMOS

机译：MEMS / CMOS的3D集成晶圆键合
- 作者：Alison Gracias;James Castracane;Bai Xu
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- Reliability;
- Packaging;
- 3D integration;
44.A transient charging model to predict actuation-voltage shift in RF MEMS capacitive switches

机译：一种瞬态充电模型，以预测RF MEMS电容开关中的致动电压移位
- 作者：Xiaobin Yuan;James C. M. Hwang;David Forehand;Charles L. Goldsmith
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Charging;
- dilectric;
- lifetime;
- MEMS;
- RF;
- reliability;
- switch;
- trap;
- accelerated lift test;
45.A new technique for 3D profilometry of MEMS

机译：MEMS的3D轮廓学新技术
- 作者：Igor Lyuboshenko;Alain Bosseboeuf;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- 3D profilometry;
- MEMS;
- interferometry;
- microscopy;
46.A new technique for 3D profilometry of MEMS

机译：MEMS的3D轮廓学新技术
- 作者：Igor Lyuboshenko;Alain Bosseboeuf
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- 3D profilometry;
- MEMS;
- interferometry;
- microscopy;
47.Using periodic electrical excitation to achieve stick-release in micro-cantilevers

机译：使用定期电激励以实现微悬臂中的粘土
- 作者：Amit Savkar;Kevin D. Murphy
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
48.Wafer Bonding for 3D Integration of MEMS/CMOS

机译：MEMS / CMOS的3D集成晶圆键合
- 作者：Alison Gracias;James Castracane;Bai Xu;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- MEMS;
- reliability;
- packaging;
- 3D integration;
49.Using Periodic Electrical Excitation to Achieve Stick-Release in Micro-Cantilevers

机译：使用定期电激励以实现微悬臂中的粘土
- 作者：Amit Savkar;Kevin D. Murphy;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
50.Temperature Compensation Analysis of Liquid Lens for Variable-Focus Control

机译：可变聚焦控制液体透镜的温度补偿分析
- 作者：Shu-Jung Chen;Tsai-Lin Tai;Chih-Hsiung Shen;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- liquid lens;
- electrowetting;
- temperature compensation;
51.A transient charging model to predict actuation-voltage shift in RF MEMS capacitive switches

机译：一种瞬态充电模型，以预测RF MEMS电容开关中的致动电压移位
- 作者：Xiaobin Yuan;James C. M. Hwang;David Forehand;Charles L. Goldsmith;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- charging;
- dielectric;
- lifetime;
- MEMS;
- RF;
- reliability;
- switch;
- trap;
- accelerated life test;
52.Reliability of MEMS for space applications

机译：空间应用MEMS的可靠性
- 作者：Herbert R. Shea
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
53.Reliability of MEMS for space applications

机译：空间应用MEMS的可靠性
- 作者：Herbert R. Shea;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
54.High-speed anisotropic etching of quartz using SF6/C4F8/Ar/O2 based chemistry in inductively coupled plasma reactive ion etching system

机译：在电感耦合等离子体反应离子蚀刻系统中使用基于SF6 / C4F8 / AR / O2的SF6 / C4F8 / AR / O2的石英的高速各向异性蚀刻
- 作者：Abhijat Goyal;Vincent Hood;Srinivas Tadigadapa
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
55.High Speed Anisotropic Etching of Quartz using SF_6/C_4F_8/Ar/O_2 based chemistry in Inductively Coupled Plasma Reactive Ion Etching system

机译：在电感耦合等离子体反应离子蚀刻系统中使用基于SF_6 / C_4F_8 / AR / O_2的SF_6 / C_4F_8 / AR / O_2的高速各向异性蚀刻。
- 作者：Abhijat Goyal;Vincent Hood;Srinivas Tadigadapa;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
56.Qualification Testing of Engineering Camera and Platinum Resistance Thermometer (PRT) Sensors for Mars Science Laboratory (MSL) Project under Extreme Temperatures to Assess Reliability and to Enhance Mission Assurance

机译：在极端气温下，MARS科学实验室（MSL）项目的工程相机和铂电阻温度计（PRT）传感器的资格测试，以评估可靠性和提高任务保证
- 作者：Rajeshuni Ramesham;Justin N. Maki;Gordon C. Cucullu
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
57.Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation

机译：用于天文仪器的低温环境中MOEMS器件的干涉测量
- 作者：Frederic Zamkotsian;Emmanuel Grassi;Severin Waldis;Rudy Barette;Patrick Lanzoni;Christophe Fabron;Wilfried Noell;Nico de Rooij
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- micro-mirror array;
- multi-object spectrograph;
- MOEMS;
58.A Perspective on the Reliability of MEMS-Based Components for Telecommunications

机译：关于电信基于MEMS的可靠性的视角
- 作者：John C. McNulty
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMS;
- tunable laser;
- tunable filter;
- VOA;
- DCE;
- reliability;
- optical;
- telcordia;
59.Characterization of Micro Resistance Welding with Electro-thermal Actuator for Micro Assembly

机译：微包装电热致动器微电阻焊接的表征
- 作者：Chun-Wei Chang;Wensyang Hsu
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- micro resistance welding;
- micro assembly;
- thermal fusion;
- thermal assembly;
- micro welding;
60.Microfabricated Implantable Pressure Sensor for Flow Measurement

机译：用于流量测量的微制造植入压力传感器
- 作者：Sheng Liu;Reginald Farrow;James L. Zunino III;Hee C. Lim;John Federici;Gordon Thomas
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- flowmeter;
- pressure sensor;
- MEMS;
- resonant frequency;
61.Mechanics of the Dynamic Release Process for Stiction Failed Micro Cantilever Beams Using Structural Vibrations

机译：使用结构振动的静态变化微悬臂梁的动态释放过程的力学
- 作者：Amit Savkar;Kevin D. Murphy
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
62.Measuring mass flows in hermetically sealed MEMs MOEMs to ensure device reliability

机译：测量质量在气密密封的MEMS和MOEM中流动，以确保设备可靠性
- 作者：R. C. Kullberg;D. J. Rossiter
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMs;
- MOEMs;
- reliability;
- RGA;
- outgassing;
- leak;
- analytical;
- time of flight;
- TOf;
63.Low-temperature vacuum hermetic wafer-level package for uncooled microbolometer FPAs

机译：低温真空密封晶片级包装，用于未冷却微生物计FPAS
- 作者：S. Garcia-Blanco;P. Topart;Y. Desroches;J.S. Caron;F. Williamson;C. Alain;H. Jerominek
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- wafer-level-packaging;
- fluxless;
- microbolometer FPA;
- low temperature;
- micropackage;
64.Photosensitive Etch Protection Coating for Silicon Wet-Etch Applications

机译：用于硅湿蚀刻应用的光敏蚀刻保护涂层
- 作者：J. Dalvi-Malhotra;X. F. Zhong;C. Planje
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- silane-based primer;
- spin-on polymeric material;
- photosensitive etch protection coating;
- alkaline wet etching;
65.Reliability testing analysis of Sating Arming devices for Army fuzes

机译：军队Fuzes安全臂装置的可靠性测试与分析
- 作者：James L. Zunino III;Donald R. Skelton;Charles Robinson
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMS;
- army;
- safing amp;
- arming;
- fuze;
- survivability;
- reliability;
- measurement techniques;
66.Support for microsystems simulation: Are we watching the clock?

机译：支持微系统仿真：我们正在观看时钟吗？
- 作者：C. K. Drummond;F. J. Lisy
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- microsystems;
- simulation;
- materials;
- databases;
- life;
- reliability;
- harsh environments;
67.Development of nondestructive testing/evaluation methodology for MEMS

机译：MEMS的非破坏性测试/评估方法的开发
- 作者：James L. Zunino III;Donald R. Skelton;Ryan T. Marinis;Adam R. Klempner;Peter Hefti;Ryszard J. Pryputniewicz
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
68.Reliability testing and qualification of the TeraVicta RF MEMS switch

机译：Teravicta RF MEMS开关的可靠性测试和资格
- 作者：John S. McKillop
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
69.Reliability Testing and Qualification of the TeraVicta RF MEMS Switch

机译：Teravicta RF MEMS开关的可靠性测试和资格
- 作者：John S. McKillop;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
70.Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation

机译：铝合金梁的弯曲取决于紫外激光辐射的辐照度和重复率
- 作者：Mathias Krellmann;Martin Friedrichs;Ulrike Dauderstadt;Michael Wagner;Hubert Lakner
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- UV-aluminum alloy interaction;
- MOEMS;
- thin beam bending;
- energy density;
- repetition rate;
71.Fatigue of polycrystalline silicon films with thin surface oxides

机译：具有薄表面氧化物的多晶硅膜的疲劳
- 作者：O. N. Pierron;C. L. Muhlstein
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- silicon;
- fatigue;
- MEMS;
- reaction-layer fatigue;
72.Improvement of the elastic modulus of micromachined structures using carbon nanotubes

机译：使用碳纳米管改善微机械结构的弹性模量
- 作者：Prasoon Joshi;Abhijat Goyal;Awnish Gupta;Srinivas Tadigadapa;Peter C. Eklund
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- Sihngle Walled Carbon Nanotubes;
- Dissolved Wafer Process;
- Resonance Frequency;
73.Fatigue of Polycrystalline Silicon Films with Thin Surface Oxides

机译：具有薄表面氧化物的多晶硅膜的疲劳
- 作者：O.N. Pierron;C.L. Muhlstein;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- silicon;
- fatigue;
- MEMS;
- reaction-layer fatigue;
74.Bending of Aluminum Alloy Beams depending on Irradiance and Repetition Rate of UV Laser Radiation

机译：铝合金梁的弯曲取决于紫外激光辐射的辐照度和重复率
- 作者：Mathias Krellmann;Martin Friedrichs;Ulrike Dauderstaedt;Michael Wagner;Hubert Lakner;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- UV-aluminum alloy interaction;
- MOEMS;
- thin beam bending;
- energy density;
- repetition rate;
75.Improvement of the Elastic Modulus of Micromachined Structures using Carbon Nanotubes

机译：使用碳纳米管改善微机械结构的弹性模量
- 作者：Prasoon Joshi;Abhijat Goyal;Awnish Gupta;Srinivas Tadigadapa;Peter C Eklund;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- single walled carbon nanotubes;
- dissolved wafer process;
- resonance frequency;
76.Hot Gas Stream Application in Micro-bonding Technique

机译：微粘接技术的热气流应用
- 作者：Daniela Andrijasevic;Ioanna Giouroudi;Walter Smetana;Stefan Boehm;Werner Brenner;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- micro-bonding;
- hot gas stream;
- adhesives;
- V-grooves;
77.Hot gas stream application in micro-bonding technique

机译：微粘接技术的热气流应用
- 作者：Daniela Andrijasevic;Ioanna Giouroudi;Walter Smetana;Stefan Boehm;Werner Brenner
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2006年
- micro-bonding;
- hot gas stream;
- adhesives;
- V-grooves;
78.MEMS as Low Cost High Volume Semiconductor Solutions It's all in the Packaging and Assembly

机译：MEMS作为低成本高批量半导体解决方案，这一切都在包装和组装中
- 作者：Joe Brown;Markus Lutz;Aaron Partridge;Pavan Gupta;Eric Radza
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
79.Electrical Measurement of Undercut in Surface Micromachining

机译：表面微机械线底切的电气测量
- 作者：Somashekara Bhat;Enakshi Bhattacharya
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- surface micromachining;
- undercut;
- polysilicon resistor;
- cantilever;
- resonance frequency;
- MEMS;
80.Degradation Evaluation of Microelectromechanical Thermal Actuators

机译：微机电热致动器的降解评价
- 作者：J.K.Lou;Y.Q.Fu;Q.A.Huang;J.A.Williams;W.I.Milne
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- thermal actuator;
- back bending;
- plastic deformation;
- thermal degradation;
- creep;
- reflow;
81.MEMS Reliability - Coming of Age

机译：MEMS可靠性 - 年龄到来
- 作者：Michael R. Douglass
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMS;
- MOEMS;
- reliability;
- FMEA;
- accelerated testing;
- stress testing;
82.Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps

机译：微米刻度隙MEMS器件电气故障的实验研究
- 作者：P. Carazzetti;Ph. Renaud;H. R. Shea
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- paschen curve;
- breakdown voltage;
- MEMS;
- planar interdigitated electrodes;
- aluminum;
- helium;
- argon;
- nitrogen;
- mean free path;
83.Study of Ag-In solder as low temperature wafer bonding intermediate layer

机译：作为低温晶片键合中间层的Ag - 焊料研究
- 作者：Riko I Made;Chee Lip Gan;Chengkuo Lee;Li Ling Yan;Aibin Yu;Seung Wook Yoon;John H. Lau
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- In;
- Ag;
- solder;
- low temperature bonding;
- packaging;
84.Reliability of MEMS Devices in Shock and Vibration Overload Situations

机译：震动和振动过载情况中MEMS器件的可靠性
- 作者：Steffen Kurth;Alexey Shaporin;Karla Hiller;Christian Kaufmann;Thomas Gessner
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- shock test;
- overload behavior;
- shock acceleration response;
85.Understanding and Improving Longevity in RF MEMS Capacitive Switches

机译：在RF MEMS电容开关中了解和提高寿命
- 作者：Chuck Goldsmith;David Forehand;Derek Scarbrough;Zheng Peng;Cris Palego;James Hwang;Jason Clevenger
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- RF MEMS;
- reliability;
- dielectric charging;
- MEMS switches;
86.Measurement of Thin Films and Interfacial Surface Roughness Using SWLI

机译：使用SWLI测量薄膜和界面粗糙度
- 作者：Mike Conroy
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- interferometry;
- metrology;
- film thickness;
- thick film;
- thin film;
- surface roughness;
87.Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source

机译：棚屋传感器和点源光学测试的不确定性分析
- 作者：Dong Won Kang;Jin Seok Lee;Ho-Soon Yang;Jae Won Hahn
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- shack-hartmann sensor;
- wavefront measurement;
- optical testing;
- high numerical aperture;
- pinhole point source;
88.Challenges of Designing and Processing Extreme Low-G Micro Electrical-Mechanical System (MEMS) Accelerometers

机译：设计和加工极端低G微机电系统（MEMS）加速度计的挑战
- 作者：Thomas P. Swiler;Uma Krishnamoorthy;Peggy J. Clews;Michael S. Baker;Danelle M. Tanner
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMS;
- nano-G;
- accelerometer;
- sub-wavelength grating;
- MEMS packaging;
- MEMS release;
89.Confocal Microscopy Scanned by Digital Micromirror Devise with Stray Light Filters

机译：具有杂散灯过滤器的数字微镜装置扫描的共聚焦显微镜
- 作者：Chuan-Cheng Hung;Chang-Ching Lin;Koung-Ming Yeh;Yi-Chin Fang;Jia-Hua Wu;Hung-Chi Sun;Wei-Chi Lai;Yi-Liang Chen
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- confocal microscopy;
- surface profilometry;
- digital micromirror devices (DMD);
- surface inspection;
90.Measuring MEMS through Silicon Caps

机译：通过硅帽测量MEMS
- 作者：Matthew Hazel;Maurice Karpman
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2008年
- MEMS;
- capping;
- microscopy;
- confocal;
- failure analysis;
- reliability;
- IR;
- imaging;
- inspection;
91.Simple measurement technique for resonance frequency of micromachined cantilevers

机译：微机械悬臂谐振频率的简单测量技术
- 作者：Somashekara Bhat;Enakshi Bhattacharya;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- MEMS;
- cantilever;
- resonance;
- polysilicon;
- pull-in;
- vibrometer;
- gravimetry;
- wet etching;
92.Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM)

机译：数字全息显微镜（DHM）对MEMS和MOEMS的过程工程和故障分析
- 作者：Frederic Montfort;Yves Emery;Francois Marquet;Etienne Cuche;Nicolas Aspert;Eduardo Solanas;Alexandre Mehdaoui;Adrian Ionescu;Christian Depeursinge;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- digital holography microscopy;
- interferometer resolution;
- MEMS amp;
- MOEMS;
- dynamical analysis;
- failure analysis;
93.Testing reliability of MEMS materials in liquids

机译：液体中MEMS材料的可靠性
- 作者：Thomas P. Kuehn;S. Mubassar Ali;Susan C. Mantell;Ellen K. Longmire;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- MEMS reliability;
- optical lever;
- resonance tracking;
- piezoelectric actuation;
- MEMS in liquids;
94.PERFORMANCE AND RELIABILITY TEST OF MEMS OPTICAL SCANNERS

机译：MEMS光学扫描仪的性能和可靠性测试
- 作者：Steffen Kurth;Christian Kaufmann;Ramon Hahn;Jan Mehner;Wolfram Doetzel;Thomas Gessner;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- wafer level test;
- scanner;
- interferometer;
- structural modal analysis;
95.A novel technique for extraction of material properties through measurement of pull-in voltage and off-capacitance of beams

机译：一种新型技术，用于通过测量梁的拉伸电压和横截面的剥离电压提取材料特性
- 作者：Jaibir Sharma;Amitava DasGupta;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- extraction of material properties;
- young's modulus;
- residual stress;
- pull-in voltage;
- off-capacitance;
- pullout voltage;
- cantilever;
- double supported;
- intellisuite;
96.Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

机译：V添加对MEMS触头开关的Au薄膜力学行为的影响
- 作者：T. Bannuru;S. Narksitipan;W. L. Brown;R.P. Vinci;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- MEMS switches;
- contact resistance;
- hardness;
- Au alloys;
97.Receptor-free nanomechanical sensors

机译：无受体纳米机械传感器
- 作者：Larry R. Senesac;Dechang Yi;Thomas Thundat;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- cantilever sensors;
- sensor arrays;
- explosive vapor detection;
- cantilever bending;
- adsorption-induced stress;
- photothermal spectroscopy;
98.Hybrid approach to MEMS reliability assessment

机译：MEMS可靠性评估的混合方法
- 作者：James L. Zunino III;Donald R. Skelton;Wei Han;Ryszard J. Pryputniewicz;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- MEMS technology;
- reliability assessment;
- thermal;
- static;
- and dynamic loads;
- measurement techniques;
- hybrid methodology;
99.Metal contact reliability of RF MEMS switches

机译：RF MEMS开关的金属接触可靠性
- 作者：Oing Ma;Ouan Tran;Tsung-Kuan A. Chou;John Heck;Hanan Bar;Rishi Kant;Valluri Rao;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- MEMS switch;
- contact;
- reliability;
100.Self-Sensing and Actuation of CNF and Ni Nanowire/Polymer Composites using Electro-Micromechanical Test

机译：CNF和Ni纳米线/聚合物复合材料的自感应和致动，使用电微型机械测试
- 作者：Joung-Man Park;Sung-Ju Kim;Pyung-Gee Kim;Dong-Jin Yoon;George Hansen;K. Lawrence DeVries;SPIE-The International Society for Optical Engineering
- 会议名称：《Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS》 | 2007年
- self-sensing;
- actuation;
- CNF;
- Ni nanowire;
- micromechanics;
- electrospun PVDF;
- electro-micromechanical test;