Electrical and optical properties of transparent conductive Cd_3TeO_6 thin films deposited by rf magnetron sputtering

摘要

Transparent conductive Cd_3TeO_6 thin films with 180 nm in thickness were prepared by rf magnetron sputtering using a powder target. With increasing annealing temperature, the resistivity of films was decreased, The Cd_3TeO_6 thin film annealed at 500 deg C exhibited a lowest resistivity of 1.9 X 10~(-2) OMEGA cm at room temperature. The carrier density and Hall mobility were 5.4 X 10~(19) cm~(-3) and 4.8 cm~2V~(-1)s~(-1), respectively. They also showed a high optical transmittance of >85 percent in visible region.