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Thickness Dependence of Microstructures and Electrical and Optical Properties of ZnO Thin Films Deposited by RF Magnetron Sputtering

机译：射频磁控溅射沉积ZnO薄膜的微观结构及其电学和光学性质的厚度依赖性

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清水秀己; 大塚一毅;
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年度 2017
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1. Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron (vol 695, pg 697, 2017) [J] . Mahdhi H., Alaya S., Gauffier J. L., Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2018,第期

机译：厚度对溅射磁控沉积的Ga掺杂ZnO薄膜结构，光学和电性能的影响（Vol 695，PG 697,2017）
2. Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron [J] . S. Alaya, J.L Gauffier, K. Djessas Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2017,第期

机译：厚度对溅射磁控沉积的Ga掺杂ZnO薄膜结构，光学和电性能的影响
3. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering [J] . Tang Ping, Li Bing, Feng Lianghuan CERAMICS INTERNATIONAL . 2018,第4期

机译：ZnO：Al薄膜的光学和电性能沉积在低温下通过RF磁控溅射沉积在低温下
4. Influence of thickness on the structural, electrical and optical properties of Al-doped ZnO films deposited by RF magnetron sputtering [C] . Jian Chen, Yihua Sun, Xiaohua Sun International Conference on Textile Engineering and Materials . 2013

机译：厚度对RF磁控溅射沉积的铝掺杂ZnO膜结构，电和光学性质的影响
5. Electrical and optical properties of silver films deposited by high power impulse magnetron sputtering. [D] . Li, Jigang. 2008

机译：通过大功率脉冲磁控溅射沉积的银膜的电学和光学性质。
6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：射频磁控溅射制备（MgAl）共掺杂ZnO薄膜的光电性能研究与研究
7. Dependences of Various Substrate Temperature on the Structural and Electrical Properties of ZnO Thin Films deposited by RF Magnetron Sputtering [O] . 2007

机译：各种衬底温度对RF磁控溅射沉积的ZnO薄膜结构和电性能的依赖性

Thickness Dependence of Microstructures and Electrical and Optical Properties of ZnO Thin Films Deposited by RF Magnetron Sputtering

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