Micromachined tunable RF capacitor with comb structure

摘要

A micromachined tunable RF capacitor with interdigitated comb plate structure is investigated in this paper. Much effort to improve tuning ratio, such as minimizing parasitical capacitance, is presented. Analysis shows the bias voltage can be lowered through the optimization of the structure parameters. Also presented in the fabrication of this capacitor based on typical bulk silicon micromachining technology.