A three-axis surfaced micro-machined accelerometer is one of the latest MEMS products on the market. Major applications are for the video game systems, disk drive protections, health care and toys. It's mechanical sensor uses a single proof-mass for sensing the x, y and z axes. The ultimate performance of this device is limited by the intrinsic noise within the device, mainly due to the combined effect of thermally dependent electrical and mechanical noise sources, and the cross-axis distortion. Noise from any source limits the utility of the accelerometer in low g and high accuracy situations. Understanding and controlling the relative importance and interactions of electrical and mechanical noise are intellectually challenging problems.
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