Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films

摘要

For the rapid structural characterization of combinatorial epitaxial thin films, we developed an X-ray diffraction system. A convergent X-ray beam from a curved crystal monochromator is focused on sample surface about 0.1 mm $MUL 10 mm in size. Diffraction patterns of this area are simultaneously observed on the 2D detector within a few degree. Thus, rocking curve profiles of combinatorial epitaxial thin films for one-column pixels can be measured rapidly with Bragg peak of substrate; the measurement time depends on the film thickness, but the most cases are within one minute.