Comprehensive Automation of the TEM: A new method for the accurate determination of the imaging conditions for arbitrary specimens

摘要

In this paper, we present a new method for determining the symmetric aberrations based on an analysis of correlation functions rather than power spectra. As such, the method is applicable to extensively crystalline objects with less amorphous material than needed for conventional diffractogram analysis. In addition, the method can be readily automated. The accuracy achieved for absolute defocus level and 2-fold astigmatism is better than 2nm, and the relative defocus values within a focal series can be determined within 0.7 nm.