Specimen for TEM and method of manufacturing specimen for TEM

摘要

For analysis area is magnified specimen transmission electron microscopy and transmission electron microscopy sample preparation method for a first direction preliminary analysis of the samples provided , and the width of the first polishing direction to the center of the analysis point to be larger than the width of the first direction and perpendicular to the second direction by analyzing the pre- analysis sample with a line extended in the form of analysis points to form a specimen . Preliminary analysis of the specimen ring and the dimple forming the dimple area, and , the pre- analysis sample dimple region is formed by ion milling to form the analysis sample by forming an ion-milling region . Therefore, it is possible to analyze a large area of the sample for analysis using a transmission electron microscope .