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SPECIMEN FOR TEM AND METHOD OF MANUFACTURING SPECIMEN FOR TEM
SPECIMEN FOR TEM AND METHOD OF MANUFACTURING SPECIMEN FOR TEM
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机译:TEM样品和制造TEM样品的方法
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摘要
A transmission electron microscope (TEM) specimen and a method of manufacturing the specimen are provided. The specimen comprises an analysis point. The specimen is formed by forming a dimple at a surface portion of the preliminary specimen, and ion milling the preliminary specimen having the dimple.
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