Self-limiting oxidation during growth of very thin oxides on Si(001) surface studied by real-time auger electron spectroscopy

机译：通过实时螺旋电子光谱研究的Si（001）表面上非常薄氧化物生长的自限氧化

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The oxide growth kinetics at the initial stage of oxidation on the Si(001) surface was investigated by real-time Auger electron spectroscopy using a grazing-incident electron beam for RHEED observation to clarify the reaction mechanism of self- limiting oxidation observed for growth of oxides as thin as several A at temperatures above 630°C.

机译：通过使用放牧入射电子束来研究Si（001）表面上氧化初始氧化阶段的氧化物生长动力学，用于阐明观察的rapeed观察，以阐明观察到的自限制氧化的反应机理氧化物如630℃高于630℃的温度。

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《International Microprocesses and Nanotechnology Conference》|2002年||共2页
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Yuji Takakuwa; Takuo Kawawa;
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中图分类 TN305-53;
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1. Rate-Limiting Reactions of Growth and Decomposition Kinetics of Very Thin Oxides on Si(001) Surfaces Studied by Reflection High-Energy Electron Diffraction Combined with Auger Electron Spectroscopy [J] . Shuichi Ogawa, Yuji Takakuwa Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2006,第9A期

机译：反射高能电子衍射-俄歇电子能谱研究Si（001）表面上非常薄的氧化物的生长和分解动力学的限速反应
2. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction [J] . Yuji TAKAKUWA 表面科学 . 2002,第9期

机译：俄歇电子能谱结合反射高能电子衍射实时监测Si（001）表面上非常薄的氧化物层的生长动力学
3. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction [J] . Yuji TAKAKUWA 表面科学 . 2002,第9期

机译：通过螺旋钻电子光谱结合反射高能电子衍射，实时监测Si（001）表面上非常薄的氧化物层的生长动力学
4. Self-limiting oxidation during growth of very thin oxides on Si001 surface studied by real-time Auger electron spectroscopy [C] . Takakuwa, Y., Kawawa, . 2002

机译：实时俄歇电子能谱研究Si 001表面上非常薄的氧化物生长过程中的自限氧化
5. Real-time photoelectron spectroscopy study of the oxidation reaction kinetics on p-type and n-type Si (001) surfaces. [D] . Yu, Zhou. 2016

机译：实时光电子能谱研究在p型和n型Si（001）表面上的氧化反应动力学。
6. Real-time Kinetics of High-mobility Group Box 1 (HMGB1) Oxidation in Extracellular Fluids Studied by in Situ Protein NMR Spectroscopy [O] . Levani Zandarashvili, Debashish Sahu, Kwanbok Lee, 2013

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7. The adsorption of nitric oxide on a silicon (100) 2 × 1 surface studied with Auger electron spectroscopy [O] . Sasse, A.G.B.M., Lakerveld, D.G., van Silfhout, Arend 1988

机译：用俄歇电子能谱研究一氧化氮在硅（100）2×1表面上的吸附
8. Oxygen Diffusion from Anodic Surface Oxide Films on Titanium Subhydride Studied by Auger Electron Spectroscopy and Electron Energy Loss Spectroscopy [R] . Wang, P. S., Wittberg, T. N., Wolf, J. D., 1984

机译：俄歇电子能谱和电子能量损失谱研究了氢化钛阳极表面氧化膜的氧扩散

Self-limiting oxidation during growth of very thin oxides on Si(001) surface studied by real-time auger electron spectroscopy

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