首页> 外文会议>ASME International Mechanical Engineering Congress and Exposition >A NONLITHOGRAPHIC APPROACH FOR CREATING UNSTABLE HIERARCHICAL (MICRO-NANO) SUPERHYDROPHOBIC SILICON SURFACES
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A NONLITHOGRAPHIC APPROACH FOR CREATING UNSTABLE HIERARCHICAL (MICRO-NANO) SUPERHYDROPHOBIC SILICON SURFACES

机译:一种产生不稳定分层(微纳米)超疏水硅表面的非光学方法

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In this paper, we report on an inexpensive nonlithographic approach to create superhydrophobic silicon surfaces using porous silicon technology. We have used a two-step method to create an unstable hierarchical (micro-nano) superhydrophobic silicon surface. Our technique is a unique combination of a high current density (170mA/cm~2) porous silicon formation step followed by a wet etching step in BOE/HNO_3. Porous silicon layers, of both n- and p-type wafers were used in these experiments. The contact and rolling angles were measured for: 1) regular porous silicon, 2) porous silicon with hierarchical fractal-shape structure, and 3) hierarchical fractal-shape porous silicon after the wet etching step. For both n- and p-type wafers, the contact angles of regular porous silicon (non-hierarchical) were around 120° with a rolling angle of 90°. With hierarchical structure, the contact angle increased to 135° and after addition wet etching, the contact angle approached 160° (superhydrophobic). Besides, after wet etching step the surface became extremely unstable showing a very low rolling angle ( < 1°).
机译:在本文中,我们报告了使用多孔硅技术产生超细硅表面的廉价的非光学方法。我们使用了两步方法来创建不稳定的分层(微纳米)超疏水硅表面。我们的技术是高电流密度(170mA / cm〜2)多孔硅形成步骤的独特组合,然后在BOE / HNO_3中进行湿法蚀刻步骤。在这些实验中使用了N-和P型晶片的多孔硅层。接触和滚动角度为:1)常规多孔硅,2)多孔硅,其具有等级分形结构和3)湿法蚀刻步骤后的分级分形多孔硅。对于N型和P型晶片,常规多孔硅(非等级)的接触角在120°大约120°,滚动角为90°。具有等级结构,接触角增加到135°,加成湿法蚀刻后,接触角接近160°(超疏水)。此外,在湿法蚀刻步骤之后,表面变得非常不稳定,显示出非常低的滚动角度(<1°)。

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